High temperature sensor
First Claim
1. High temperature substance sensor, including a substrate (4), a device (6) for raising and maintaining the temperature of the sensor, and a layer-like capacitor structure (38) with structure sizes smaller than 50 μ
- m, upon which a functional layer (18) is applied, thereby characterized, that the layer-like capacitor structure (38) is produced by the following;
application of a closed or already pre-structured electrically conductive layer as precursor of the capacitor structure (38) using a thick layer technique, structuring the electrically conductive layer using a photolithographic structuring process.
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Accused Products
Abstract
High temperature substance sensor, including
a substrate (4),
a device (6) for raising and maintaining the temperature of the sensor, and
a layer like capacitor structure (38) with structure sizes smaller than 50 μm, upon which a functional layer (18) is applied.
In accordance with the invention the layer-like capacitor structure (38) is produced by the following:
application of a complete or already pre-structured electrically conductive layer as precursor of the capacitor structure (38) using a thick layer technique,
structuring the electrically conductive layer using a photolithographic structuring process.
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Citations
8 Claims
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1. High temperature substance sensor, including
a substrate (4), a device (6) for raising and maintaining the temperature of the sensor, and a layer-like capacitor structure (38) with structure sizes smaller than 50 μ - m, upon which a functional layer (18) is applied,
thereby characterized, that the layer-like capacitor structure (38) is produced by the following;
application of a closed or already pre-structured electrically conductive layer as precursor of the capacitor structure (38) using a thick layer technique, structuring the electrically conductive layer using a photolithographic structuring process. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8)
- m, upon which a functional layer (18) is applied,
Specification