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Force detector and acceleration detector and method of manufacturing the same

  • US 20020014126A1
  • Filed: 07/17/2001
  • Published: 02/07/2002
  • Est. Priority Date: 10/12/1990
  • Status: Active Grant
First Claim
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1. A force detector comprising:

  • a flexible substrate including a fixed portion fixed to a detector casing, a working portion to which a force from an external is transmitted, and a flexible portion having flexibility formed between said fixed portion and said working portion, a fixed substrate fixed on said detector casing so as to face said flexible substrate, a working body adapted to receive a force from the external to transmit said force to said working portion of said flexible substrate, a displacement electrode formed on a surface, which faces to said fixed substrate, of said flexible substrate, and a fixed electrode formed on a surface, which faces to said flexible substrate, of said fixed substrate, wherein any one of said displacement electrode and said fixed electrode, or both the electrodes are constituted by a plurality of electrically independent localized electrodes to form a plurality of capacitance elements by electrodes opposite to each other to detect a force exerted on said working body every multidimensional respective components on the basis of changes in electrostatic capacitance values of said respective capacitance elements.

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