Method for manufacturing a structure with curved surfaces
First Claim
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1. A method for manufacturing a structure with curved surfaces comprising:
- providing a structure body;
forming a thin film on one surface of the structure body by sputtering so that the structure body is curved by an inner stress generated in the thin film, thereby the one surface of the structure body and the other surface of the structure body are formed into the curved surfaces.
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Abstract
A structure used as an electronic device including a magnetic head, an optical device, or precision parts has a structure body. A thin film is formed on one surface of the structure body by sputtering. The structure body is curved by an inner stress in the thin film, thereby the one surface and the other surface opposite to the one surface being formed into curved surfaces.
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Citations
16 Claims
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1. A method for manufacturing a structure with curved surfaces comprising:
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providing a structure body;
forming a thin film on one surface of the structure body by sputtering so that the structure body is curved by an inner stress generated in the thin film, thereby the one surface of the structure body and the other surface of the structure body are formed into the curved surfaces. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10)
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11. A method for manufacturing a magnetic head, comprising:
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providing a magnetic head substrate with a single or a plurality of built-in devices; and
forming a thin film on one surface of the magnetic head substrate by sputtering so that the magnetic head substrate is curved by an inner stress generated in the thin film, thereby the one surface and the other surface of the magnetic head substrate are formed into curved surfaces, convex one of which acts as a head surface. - View Dependent Claims (12, 14, 15)
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13. A structure with curved surfaces comprising:
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a structure body; and
a thin film formed on one surface of the structure body by sputtering, wherein the structure body is curved by an inner stress of the thin film, thereby the one surface of the structure body and the other surface of the structure body opposite to the one surface are formed into the curved surfaces.
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16. A magnetic head comprising:
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a magnetic head substrate with a single or a plurality of built-in devices; and
a thin film formed on one surface of the magnetic head substrate by sputtering, wherein the magnetic head substrate is curved by an inner stress of the thin film, thereby the one surface of the magnetic head substrate or the other surface of the magnetic head substrate opposite to the one surface is formed into a convex curved surface acts as a head surface.
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Specification