Electronic device including langasite structure compound and method for making such devices
First Claim
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1. An electronic device comprising:
- a piezoelectric layer comprising an ordered Langasite structure compound having the formula A3BC3D2E14, wherein A is strontium, B is niobium, C is gallium, D is silicon, and E is oxygen; and
at least one electrode connected to said piezoelectric layer.
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Abstract
An electronic device includes a piezoelectric layer formed of an ordered Langasite structure compound having the formula A3BC3D2E14 wherein A is strontium, B is niobium, C is gallium, D is silicon, and E is oxygen. At least one electrode is connected to the piezoelectric layer and may be configured to define a device, such as a SAW resonator or filter, or a BAW resonator or filter. The ordered Langasite structure compound may have a substantially perfectly ordered structure.
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Citations
32 Claims
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1. An electronic device comprising:
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a piezoelectric layer comprising an ordered Langasite structure compound having the formula A3BC3D2E14, wherein A is strontium, B is niobium, C is gallium, D is silicon, and E is oxygen; and
at least one electrode connected to said piezoelectric layer. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12, 13, 15, 16, 17, 18, 20, 21, 22, 23, 25, 26, 27, 28, 29, 30, 31, 32)
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14. An electronic device comprising:
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a piezoelectric layer comprising an ordered Langasite structure compound having the formula Sr3NbGa3Si2O14; and
a plurality of electrodes connected to said piezoelectric layer and configured so that the electronic device is a resonator.
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19. An electronic device comprising:
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a piezoelectric layer comprising an ordered Langasite structure compound having the formula Sr3NbGa3Si2O14; and
a plurality of pairs of electrodes connected to said piezoelectric layer and configured so that the electronic device is a filter.
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24. A method for making an electronic device comprising:
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providing a piezoelectric layer comprising an ordered Langasite structure compound having the formula A3BC3D2E14, wherein A is strontium, B is niobium, C is gallium, D is silicon, and E is oxygen; and
connecting at least one electrode to the piezoelectric layer.
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Specification