Method for applying an antireflection coating to inorganic optically transparent substrates

• US 20020017452A1
• Filed: 04/18/2001
• Published: 02/14/2002
• Est. Priority Date: 04/19/2000
• Status: Abandoned Application

• Current Assignee: Bloesch Holding AG, W. Bloesch AG
• Original Assignee: W. Bloesch AG
• Inventors: Zimmermann, Heinrich, Wittel, Birgit
• Application Number:
  US09/837,803
• Publication Number:
  US 20020017452A1
• Time in Patent Office: Days
• US Class Current: 204/192.1
• CPC Class Codes: C03C 17/3417 all coatings being oxide coatings
• CPC Class Codes: C03C 17/3435 comprising a nitride, oxynitride, boronitride or carbonitride
• CPC Class Codes: C03C 2217/734 comprising an alternation of high and low refractive indexes
• CPC Class Codes: C03C 2217/78 Coatings specially designed to be durable, e.g. scratch-resistant
• CPC Class Codes: C23C 14/02 Pretreatment of the material to be coated C23C14/04 takes precedence
• CPC Class Codes: C23C 14/34 Sputtering
• CPC Class Codes: C23C 14/505 for rotation of the substrates

Abstract

An antireflection coating having a high abrasion and scratching resistance can be applied to natural glass by sputtering, the substrates being positioned closer to the target than usual in order to obtain an increased density of the applied layers. An irregular deposition rate can be compensated by moving the substrate, thus allowing to ensure a regular thickness and therefore a high optical quality of the antireflection coating in these conditions as well. On the preferred sapphire watch glass, SiO₂ and Si₃N₄ resp. AlN and Al₂O₃ can be used for the individual layers, in particular. These layers do not have a noticeable color effect, but on account of their high hardness, their abrasion and scratching resistance is comparable to that of sapphire glass.

Claims

1. A method for applying an antireflection coating to a substrate of an optically transparent, inorganic material, wherein alternating layers of different refractive indices are applied to the substrate by means of a plasma-enhanced PVD process, more particularly by so-called sputtering, the distance between the target and the substrate being chosen such that the scratching resistance of the obtained layers is similar to or higher than that of the substrate.

2. The method of claim 1, using a substrate of natural glass or of sapphire glass.

3. The method of claim 1, wherein said layers are composed of at least two of the following materials:

SiO₂, Si₃N₄, Al₂O₃, AlN, ZrN, ZrO₂, of which SiO₂ and Si₃N₄ are preferred.

4. The method of claim 1, wherein said layers are composed of at least one of the following pairs:

SiO₂ and Si₃N₄, Al₂O₃ and AlN, ZrN and ZrO₂, SiO₂/Si₃N₄ being the preferred pair.

5. The method of claim 1, wherein the ratio of the distance d_ST between said substrate and the target and of the target diameter q is equal to 1 at the most if said substrate is positioned approximately opposite the center of the target, said diameter being determined in non-circular targets by the largest circle fitting on the target surface under said substrate, and if said substrate is positioned otherwise, said distance is chosen such that the plasma density at the location of said substrate is the same as or greater than in the case of said central positioning.

6. The method of claim 5, wherein said ratio is not greater than ½

(one half), preferably no greater than ⅓

(one third).

7. The method of claim 1, wherein said substrates are preheated prior to the coating operation in order to improve the adhesion of the layers.

8. The method of claim 1, wherein the light dispersion of the applied antireflection coating, measured in the “

tightened Bayer Test”

, is no more than twice as high as that of the uncoated sapphire glass.

9. The method of claim 1, wherein a protection layer is applied as the last layer in order to increase the chemical stability, said protection layer being substantially thinner than and preferably half as thick as the thinnest one of the antireflection coating layers.

10. The method of claim 9, wherein said protection layer consists of one of the following materials:

Si₃N₄, ZrN, Al₂O₃, ZrO₂.

11. A watch glass of natural glass, preferably sapphire glass, wherein at least a part of the surface, preferably a magnifying lens, or the entire surface is provided with an antireflection coating produced according to the method of claim 1.

12. The watch glass of claim 11, wherein the scratching resistance of said antireflection coating is essentially equal to or higher than that of the watch glass material, and in the case of a multilayer antirefiection coating, each one of the individual layers thereof has this property.

13. The watch glass of claim 11, wherein said antireflection coating is essentially color-neutral.

14. A watch provided with the watch glass of claim 11.