Acoustically actuated mems devices
First Claim
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1. A MEMS acoustic actuator comprising:
- a substrate;
an acoustic wave generator for generating an acoustic wave, said acoustic wave generator being disposed on the substrate; and
a moveable element for receiving the acoustic wave, said moveable element being operatively connected to the acoustic wave generator such that the acoustic wave generator is capable of exerting sufficient acoustic radiation pressure for moving staid moveable element.
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Abstract
The invention provides a MEMS acoustic actuator having a substrate, an acoustic wave generator for generating an acoustic wave, the acoustic wave generator is disposed on the substrate, and a moveable element for receiving the acoustic wave, said moveable element is operatively connected to the acoustic wave generator such that the acoustic wave generator is capable of exerting sufficient acoustic radiation pressure for moving the moveable clement. The moveable element has a planar surface for receiving and deflecting the acoustic wave.
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Citations
17 Claims
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1. A MEMS acoustic actuator comprising:
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a substrate;
an acoustic wave generator for generating an acoustic wave, said acoustic wave generator being disposed on the substrate; and
a moveable element for receiving the acoustic wave, said moveable element being operatively connected to the acoustic wave generator such that the acoustic wave generator is capable of exerting sufficient acoustic radiation pressure for moving staid moveable element. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12, 13, 14, 15, 16)
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17. A method of actuating a MEMS device comprising the steps of:
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launching an acoustic wave; and
receiving the acoustic wave with a moveable element such that the acoustic wave exerts sufficient radiation pressure for moving said moveable element.
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Specification