Vibrator for a vibrating gyroscope, vibrating gyroscope using the vibrator, and electronic apparatus using the vibrating gyroscope

• US 20020020218A1
• Filed: 06/14/2001
• Published: 02/21/2002
• Est. Priority Date: 06/16/2000
• Status: Active Grant

• Current Assignee: Murata Manufacturing Co Limited
• Original Assignee: Murata Manufacturing Co Limited
• Inventors: Koike, Masato, Ishitoko, Nobuyuki
• Granted Patent: US 6,668,649 B2
• Time in Patent Office: Days
• US Class Current: 73/504.02
• CPC Class Codes: G01C 19/5663 Manufacturing; Trimming; Mounting; Housings

Abstract

In order to provide a vibrating gyroscope in which variations in the angular-velocity detection sensitivity are not likely to occur even when sharp temperature changes occur, a vibrator for a vibrating gyroscope includes, on one main surface, a first detection electrode and a second detection electrode, which output a signal containing an angular-velocity signal, wherein a groove having a predetermined depth is provided between the first detection electrode and the second detection electrode. As for a vibrator for a vibrating gyroscope of the present invention, since the difference between the resonance frequency and the anti-resonance frequency in a bending vibration mode in the driving direction becomes closer to the difference between the resonance frequency and the anti-resonance frequency in a bending vibration mode in the detection direction, variations in the angular-velocity detection sensitivity are not likely to occur even when sharp temperature changes are given.

Claims

1. A vibrator for a vibrating gyroscope comprising:

a piezoelectric vibratable body; and

a first detection electrode and a second detection electrode formed on the piezoelectric body for outputting a signal containing an angular velocity,

wherein at least one groove having a predetermined depth is provided in the piezoelectric vibrating body between the first detection electrode and the second detection electrode.

2. A vibrator for a vibrating gyroscope according to claim 1, wherein the piezoelectric vibratable body comprises:

an intermediate electrode;

first and second piezoelectric bodies, each having first and second main surface, the first and second piezoelectric bodies being laminated via the intermediate electrode such that the first main surfaces of the first and second piezoelectric bodies are bonded to opposite sides of the intermediate electrode, respectively; and

a driving electrode provided on the second main surface of the second piezoelectric body, wherein the first and second detection electrodes are provided on the second main surface of the first piezoelectric body, wherein the at least one groove is provided on the second main surface of the first piezoelectric body along a longitudinal center line of the second main surface of the first piezoelectric body.

3. A vibrator for a vibrating gyroscope according to claim 2, wherein the at least one groove is symmetrical with respect to the width direction of the first piezoelectric body.

4. A vibrator for a vibrating gyroscope according to any one of claims 2 and 3, wherein the bottom portion of the at least one groove is parallel to the second main surface of the first piezoelectric body.

5. A vibrator for a vibrating gyroscope according to any one of claims 2 to 3, wherein the depth of the at least one groove is more than or equal to 10% of the thickness of the first piezoelectric body.

6. A vibrator for a vibrating gyroscope according to claim 4, wherein the depth of the at least one groove is more than or equal to 10% of the thickness of the first piezoelectric body.

7. A vibrator for a vibrating gyroscope according to one of claims 2 to 3, wherein the depth of the at least one groove is 60% to 80% of the thickness of the first piezoelectric body.

8. A vibrator for a vibrating gyroscope according to claim 4, wherein the depth of the at least one groove is 60% to 80% of the thickness of the first piezoelectric body.

9. A vibrator for a vibrating gyroscope according to claim 5, wherein the depth of the at least one groove is 60% to 80% of the thickness of the first piezoelectric body.

10. A vibrator for a vibrating gyroscope according to claim 9, wherein the bottom portion of the at least one groove is parallel to the second main surface of the first piezoelectric body.

11. A vibrating gyroscope comprising:

a vibrator for a vibrating gyroscope according to any one of claims 2 or 3;

driving means for driving the vibrator for a vibrating gyroscope; and

detection means for detecting an output generated from the vibrator for a vibrating gyroscope.

12. A vibrating gyroscope comprising:

a vibrator for a vibrating gyroscope according to claim 4;

driving means for driving the vibrator for a vibrating gyroscope; and

detection means for detecting an output generated from the vibrator for a vibrating gyroscope.

13. A vibrating gyroscope comprising:

a vibrator for a vibrating gyroscope according to claim 6;

driving means for driving the vibrator for a vibrating gyroscope; and

detection means for detecting an output generated from the vibrator for a vibrating gyroscope.

14. A vibrating gyroscope comprising:

a vibrator for a vibrating gyroscope according to claim 9;

driving means for driving the vibrator for a vibrating gyroscope; and

detection means for detecting an output generated from the vibrator for a vibrating gyroscope.

15. A vibrating gyroscope comprising:

a vibrator for a vibrating gyroscope according to claim 10;

driving means for driving the vibrator for a vibrating gyroscope; and

detection means for detecting an output generated from the vibrator for a vibrating gyroscope.

16. An electronic apparatus having a vibrating gyroscope according to claim 11.

17. An electronic apparatus having a vibrating gyroscope according to claim 12.

18. An electronic apparatus having a vibrating gyroscope according to claim 13.

19. An electronic apparatus having a vibrating gyroscope according to claim 14.

20. An electronic apparatus having a vibrating gyroscope according to claim 15.

21. A vibrator for a vibrating gyroscope according to claim 1, wherein the at least one groove has opposing side walls which are stepped.

22. A vibrator for a vibrating gyroscope according to claim 1, wherein the groove has opposing side walls which are inclined with respect to a bottom portion of the groove.

23. A vibrator for a vibrating gyroscope according to claim 1, having first and second grooves provided in the piezoelectric vibrating body between the first detection electrode and the second detection electrode, each of the first and second grooves having respective predetermined depths.

24. A vibrator for a vibrating gyroscope according to claim 23, wherein the first groove is formed parallel to a first sidewall of the vibratable body at a predetermined distance from said side wall and the second groove is formed parallel to an opposite sidewall of the vibratable body at the same predetermined distance.

25. A vibrator for a vibrating gyroscope according to claim 1, having first, second and third grooves provided in the piezoelectric vibrating body between the first detection electrode and the second detection electrode, with the third groove being intermediate to the first and second grooves, each of the grooves having respective predetermined depths, with the first and second grooves having the same predetermined depth.

26. A vibrator for a vibrating gyroscope according to claim 1, wherein the piezoelectric vibratable body has a rectangular parallelpiped shape.

27. A vibrator for a vibrating gyroscope according to claim 1, wherein the piezoelectric vibratable body has a cylindrical shape.

28. A vibrator for a vibrating gyroscope according to claim 1, wherein a bottom portion of the at least one groove is located in the second piezoelectric vibrating body.

29. A vibrator for a vibrating gyroscope according to claim 28, wherein the bottom portion includes a plate made of steel, silicon or a ferrite.