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Method of driving MEMS sensor with balanced four-phase comb drive

  • US 20020020219A1
  • Filed: 03/13/2001
  • Published: 02/21/2002
  • Est. Priority Date: 03/13/2000
  • Status: Abandoned Application
First Claim
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1. A method of vibrating a proof mass in a microelectromechanical sensor at a desired motor frequency wherein the proof mass is flexibly supported above a substrate with first, second, third and fourth moveable electrodes connected to the proof mass and adjacent to first, second, third and fourth fixed electrodes connected to the substrate, respectively, the method comprising the steps of:

  • applying to the first and third fixed electrodes first and third periodic driveforms that operate to periodically pull the proof mass in one direction;

    applying to the second and fourth fixed electrodes second and fourth periodic driveforms that operate to periodically pull the proof mass in the opposite direction; and

    phasing the first, second, third and fourth periodic driveforms relative to one another to cause the first and third periodic driveforms to pull the proof mass in the one direction during one period of periodic proof mass movement and to cause the second and fourth periodic driveforms to pull the proof mass in the opposite direction in a subsequent period of periodic proof mass movement.

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