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Accelerometer without proof mass

  • US 20020020689A1
  • Filed: 04/30/2001
  • Published: 02/21/2002
  • Est. Priority Date: 06/26/1996
  • Status: Active Grant
First Claim
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1. A process for fabricating an accelerometer, comprising:

  • (a) providing a substrate with a layer of electrically conductive material on said substrate;

    (b) micromachining said substrate to form a central electrical heater, a pair of temperature sensitive elements, and a cavity beneath said heater and said temperature sensing elements, each temperature sensing element being spaced apart from said heater a distance in the range of 75 to 400 microns and said temperature sensing elements located on opposite sides of said heater, thereby forming an accelerometer.

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