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Beam delivery system

  • US 20020020692A1
  • Filed: 09/10/2001
  • Published: 02/21/2002
  • Est. Priority Date: 06/28/1999
  • Status: Active Grant
First Claim
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1. A beam delivery system is which a photon energy beam is directed along a beam path, said beam delivery system comprising a gas distribution tube configured to deliver a flow of gas proximal to said beam path when a flow of gas is delivered to said gas distribution tube.

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