SMIF container latch mechanism
First Claim
1. A latch mechanism for latching a first member to a second member, said latch mechanism comprising:
- (a) a latch lock mounted to said first member, said latch lock comprising;
(i) a finger portion; and
(ii) an angled portion angled with respect to said finger portion;
(b) a latch mounted to said first member, said latch adapted to move between a latched position and an unlatched position, said latch comprising;
(i) an engagement portion adapted to contact a portion of said second member when said latch is in said latched position so as to maintain contact between said first member and said second member; and
(ii) a slot for receiving said finger of said latch lock; and
(c) an actuation pin positioned in said slot of said latch and adapted move laterally between a first position and a second position, said actuation pin adapted to slidably contact said angled portion such that when said actuation pin moves between said first position and said second position said angled portion moves in a direction orthogonal to the lateral movement such that said finger portion is moved into and out of said slot, said latch adapted to move between said latched and unlatched positions when said finger portion is not positioned in said slot.
3 Assignments
0 Petitions
Accused Products
Abstract
The present invention includes a latch assembly, such as maybe useful for SMIF pods. SMIF pods are in general comprised of a pod door which mates with a pod shell to provide a sealed environment in which wafers may be stored and transferred. During wafer storage and transport, the pod door is typically held affixed to the pod shell by a latch assembly. When it is desired to separate the pod door from the pod shell, each latch must be actuated outwardly, to withdraw each engagement portion from the pod door, at which time the pod door may be separated. The present invention includes an improved such latch assembly.
-
Citations
31 Claims
-
1. A latch mechanism for latching a first member to a second member, said latch mechanism comprising:
-
(a) a latch lock mounted to said first member, said latch lock comprising;
(i) a finger portion; and
(ii) an angled portion angled with respect to said finger portion;
(b) a latch mounted to said first member, said latch adapted to move between a latched position and an unlatched position, said latch comprising;
(i) an engagement portion adapted to contact a portion of said second member when said latch is in said latched position so as to maintain contact between said first member and said second member; and
(ii) a slot for receiving said finger of said latch lock; and
(c) an actuation pin positioned in said slot of said latch and adapted move laterally between a first position and a second position, said actuation pin adapted to slidably contact said angled portion such that when said actuation pin moves between said first position and said second position said angled portion moves in a direction orthogonal to the lateral movement such that said finger portion is moved into and out of said slot, said latch adapted to move between said latched and unlatched positions when said finger portion is not positioned in said slot. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10)
-
-
11. A latch mechanism for latching a door to a container, said latch mechanism comprising:
-
(a) a latch lock mounted to said container, said latch lock comprising;
(i) a finger portion; and
(ii) an angled portion angled with respect to said finger portion;
(b) a latch mounted to said container, said latch adapted to move between a latched position and an unlatched position, said latch comprising;
(i) an engagement portion adapted to contact a portion of said door when said latch is in said latched position so as to maintain contact between said door and said container and (ii) a slot for receiving said finger of said latch lock; and
(c) an actuation pin positioned in said slot of said latch and adapted move laterally between a first position and a second position, said actuation pin adapted to slidably contact said angled portion such that when said actuation pin moves between said first position and said second position said angled portion moves in a direction orthogonal to the lateral movement such that said finger portion is moved into and out of said slot, said latch adapted to move between said latched and unlatched positions when said finger portion is not positioned in said slot. - View Dependent Claims (12, 13, 14, 15, 16, 17, 18, 19, 20, 21, 22, 24, 25, 26, 27, 28, 29, 30, 31)
-
-
23. A latch mechanism for latching a pod door to a shell of a pod adapted to contain a workpiece, said latch mechanism comprising:
-
(a) a latch lock mounted to said shell, said latch lock comprising;
(i) a finger portion; and
(ii) an angled portion angled with respect to said finger portion;
(b) a perimeter latch mounted to said shell, said perimeter latch adapted to move between a latched position and an unlatched position, said perimeter latch comprising;
(i) an engagement portion adapted to contact a portion of said pod door when said perimeter latch is in said latched position so as to maintain contact between said pod door and said shell; and
(ii) a slot for receiving said finger of said latch lock; and
(c) an actuation pin positioned in said slot of said perimeter latch and adapted move laterally between a first position and a second position, said actuation pin adapted to slidably contact said angled portion such that when said actuation pin moves between said first position and said second position said angled portion moves in a direction orthogonal to the lateral movement such that said finger portion is moved into and out of said slot, said latch adapted to move between said latched and unlatched positions when said finger portion is not positioned in said slot.
-
Specification