SMIF container latch mechanism

• US 20020021009A1
• Filed: 07/10/2001
• Published: 02/21/2002
• Est. Priority Date: 07/10/2000
• Status: Active Grant

• Current Assignee: Entegris Incorporated
• Original Assignee: Entegris Cayman Limited (Entegris Incorporated)
• Inventors: Pennybacker, William P., Wartenbergh, Robert P., Smith, Mark V.
• Granted Patent: US 6,536,813 B2
• Time in Patent Office: Days
• US Class Current: 292/145
• CPC Class Codes: H01L 21/67373 characterised by locking systems
• CPC Class Codes: Y10T 292/0836 Operating means
• CPC Class Codes: Y10T 292/084 Cam
• CPC Class Codes: Y10T 292/0962 Operating means
• CPC Class Codes: Y10T 292/1014 Operating means
• CPC Class Codes: Y10T 292/1016 Cam
• CPC Class Codes: Y10T 292/1022 Rigid

Abstract

The present invention includes a latch assembly, such as maybe useful for SMIF pods. SMIF pods are in general comprised of a pod door which mates with a pod shell to provide a sealed environment in which wafers may be stored and transferred. During wafer storage and transport, the pod door is typically held affixed to the pod shell by a latch assembly. When it is desired to separate the pod door from the pod shell, each latch must be actuated outwardly, to withdraw each engagement portion from the pod door, at which time the pod door may be separated. The present invention includes an improved such latch assembly.

Claims

1. A latch mechanism for latching a first member to a second member, said latch mechanism comprising:

(a) a latch lock mounted to said first member, said latch lock comprising;

(i) a finger portion; and

(ii) an angled portion angled with respect to said finger portion;

(b) a latch mounted to said first member, said latch adapted to move between a latched position and an unlatched position, said latch comprising;

(i) an engagement portion adapted to contact a portion of said second member when said latch is in said latched position so as to maintain contact between said first member and said second member; and

(ii) a slot for receiving said finger of said latch lock; and

(c) an actuation pin positioned in said slot of said latch and adapted move laterally between a first position and a second position, said actuation pin adapted to slidably contact said angled portion such that when said actuation pin moves between said first position and said second position said angled portion moves in a direction orthogonal to the lateral movement such that said finger portion is moved into and out of said slot, said latch adapted to move between said latched and unlatched positions when said finger portion is not positioned in said slot.

2. A latch mechanism according to claim 1, further comprising a spring adapted to mount said latch to said first member.

3. A latch mechanism according to claim 2, wherein said spring is a leaf spring.

4. A latch mechanism according to claim 2, wherein said spring is adapted to allow said latch to move between said latched and unlatched positions, said spring being flexed when said latch is in said unlatched position.

5. A latch mechanism according to claim 1, wherein said slot has a wall portion, and said finger portion is adapted to contact said wall portion to prevent said engagement portion from losing contact with said second member when said finger portion is in said slot.

6. A latch mechanism according to claim 1, further comprising a support surface for supporting said first and second members.

7. A latch mechanism according to claim 6, wherein said actuation pin is mounted to said support surface.

8. A latch mechanism according to claim 6, further comprising a motor adapted to drive the lateral movement of said actuation pin.

9. A latch mechanism according to claim 1, wherein said actuation pin is further adapted to move clear of said latch when said finger portion is out of said slot.

10. A latch mechanism according to claim 9, wherein said latch lock is adapted to move back to said latched position when said first and second members are not in contact.

11. A latch mechanism for latching a door to a container, said latch mechanism comprising:

(a) a latch lock mounted to said container, said latch lock comprising;

(i) a finger portion; and

(ii) an angled portion angled with respect to said finger portion;

(b) a latch mounted to said container, said latch adapted to move between a latched position and an unlatched position, said latch comprising;

(i) an engagement portion adapted to contact a portion of said door when said latch is in said latched position so as to maintain contact between said door and said container and

(ii) a slot for receiving said finger of said latch lock; and

(c) an actuation pin positioned in said slot of said latch and adapted move laterally between a first position and a second position, said actuation pin adapted to slidably contact said angled portion such that when said actuation pin moves between said first position and said second position said angled portion moves in a direction orthogonal to the lateral movement such that said finger portion is moved into and out of said slot, said latch adapted to move between said latched and unlatched positions when said finger portion is not positioned in said slot.

12. A latch mechanism according to claim 11, further comprising a spring adapted to mount said latch to said container and allow said latch to move between said latched and unlatched positions, said spring being flexed when said latch is in said unlatched position.

13. A latch mechanism according to claim 11, wherein said slot has a wall portion, and said finger portion is adapted to contact said wall portion to prevent said engagement portion from losing contact with said door when said finger portion is in said slot.

14. A latch mechanism according to claim 11, further comprising a support surface for supporting said container.

15. A latch mechanism according to claim 14, wherein said actuation pin is mounted to said support surface.

16. A latch mechanism according to claim 11, further comprising a motor adapted to drive the lateral movement of said actuation pin.

17. A latch mechanism according to claim 11, wherein said container has an inner wall and an outer wall, and said latch lock is formed between said inner wall and said outer wall of said container.

18. A latch mechanism according to claim 11, wherein said latch lock is molded as part of the container.

19. A latch mechanism according to claim 11, wherein said latch lock is comprised of a polymer.

20. A latch mechanism according to claim 19, wherein said polymer is selected from the group consisting of polycarbonate and acrylonitrile-butadiene-styrene (ABS).

21. A latch mechanism according to claim 11, wherein said latch lock is approximately three-quarters of an inch in length.

22. A latch mechanism according to claim 11, wherein said door and said container define a sealed environment.

24. A latch mechanism according to claim 23, further comprising a spring adapted to mount said perimeter latch to said shell and allow said perimeter latch to move between said latched and unlatched positions, said spring being flexed when said perimeter latch is in said unlatched position.

25. A latch mechanism according to claim 23, further comprising a support surface for supporting said pod.

26. A latch mechanism according to claim 23, wherein said actuation pin is mounted to said support surface.

27. A latch mechanism according to claim 23, further comprising a motor adapted to drive the lateral movement of said actuation pin.

28. A latch mechanism according to claim 23, wherein said pod defines a sealed environment.

29. A latch mechanism according to claim 23, wherein said workpiece is selected from the group consisting of semiconductor wafers, reticles, and flat panel displays.

30. A latch mechanism according to claim 23, wherein said pod operates according to SMIF technology.

31. A latch mechanism according to claim 23, wherein said pod comprises multiple said latch mechanisms.

23. A latch mechanism for latching a pod door to a shell of a pod adapted to contain a workpiece, said latch mechanism comprising:

(a) a latch lock mounted to said shell, said latch lock comprising;

(i) a finger portion; and

(ii) an angled portion angled with respect to said finger portion;

(b) a perimeter latch mounted to said shell, said perimeter latch adapted to move between a latched position and an unlatched position, said perimeter latch comprising;

(i) an engagement portion adapted to contact a portion of said pod door when said perimeter latch is in said latched position so as to maintain contact between said pod door and said shell; and

(ii) a slot for receiving said finger of said latch lock; and

(c) an actuation pin positioned in said slot of said perimeter latch and adapted move laterally between a first position and a second position, said actuation pin adapted to slidably contact said angled portion such that when said actuation pin moves between said first position and said second position said angled portion moves in a direction orthogonal to the lateral movement such that said finger portion is moved into and out of said slot, said latch adapted to move between said latched and unlatched positions when said finger portion is not positioned in said slot.