Electronic filter including langasite structure compound and method for making same
First Claim
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1. An electronic filter comprising:
- a piezoelectric layer comprising an ordered Langasite structure compound having the formula A3BC3D2E14, wherein A is strontium, B is tantalum, C is gallium, D is silicon, and E is oxygen; and
a plurality of pairs of electrodes connected to said piezoelectric layer and configured to cooperate with said piezoelectric layer to perform a filtering function.
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Abstract
An electronic filter includes a piezoelectric layer formed of an ordered Langasite structure compound having the formula A3BC3D2E14, wherein A is strontium, B is tantalum, C is gallium, D is silicon, and E is oxygen. A plurality of pairs of electrodes are connected to and cooperate with the piezoelectric layer to define a SAW or BAW filter, for example. The ordered Langasite structure compound may have a substantially perfectly ordered structure.
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Citations
25 Claims
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1. An electronic filter comprising:
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a piezoelectric layer comprising an ordered Langasite structure compound having the formula A3BC3D2E14, wherein A is strontium, B is tantalum, C is gallium, D is silicon, and E is oxygen; and
a plurality of pairs of electrodes connected to said piezoelectric layer and configured to cooperate with said piezoelectric layer to perform a filtering function. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8)
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9. An electronic filter comprising:
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a piezoelectric layer comprising an ordered Langasite structure compound having the formula Sr3TaGa3Si2O14; and
first and second pairs of electrodes connected to a same face of said piezoelectric layer so that the electronic filter is a surface acoustic wave (SAW) filter. - View Dependent Claims (10, 11, 12, 13, 14, 16, 17, 18, 19, 20)
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15. An electronic filter comprising:
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a piezoelectric layer comprising an ordered Langasite structure compound having the formula Sr3TaGa3Si2O14; and
first and second pairs of electrodes connected to respective opposite first and second faces of said piezoelectric layer so that the electronic filter is a bulk acoustic wave (BAW) filter.
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21. A method for making an electronic filter comprising:
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providing a piezoelectric layer comprising an ordered Langasite structure compound having the formula A3BC3D2E14, wherein A is strontium, B is tantalum, C is gallium, D is silicon, and E is oxygen; and
connecting a plurality of pairs of electrodes to the piezoelectric layer to cooperate therewith and perform a filtering function. - View Dependent Claims (22, 23, 24, 25)
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Specification