Blazed micro-mechanical light modulator and array thereof

• US 20020021485A1
• Filed: 07/11/2001
• Published: 02/21/2002
• Est. Priority Date: 07/13/2000
• Status: Active Grant

• Current Assignee: Kodak Limited (Eastman Kodak Company)
• Original Assignee: CREO Company Limited
• Inventors: Pilossof, Nissim
• Granted Patent: US 6,618,187 B2
• Time in Patent Office: Days
• US Class Current: 359/295
• CPC Class Codes: G02B 26/0808 by means of one or more diffracting elements
• CPC Class Codes: G02B 5/18 Diffraction gratings holographic optical elements G02B5/32, G03H; integrally combined with optical fibres G02B6/02057; for coupling light guides G02B6/34; integrally combined with optical integrated light guides G02B6/12; grating systems G02B27/44
• CPC Class Codes: G02B 5/1828 having means for producing variable diffraction controlling the direction of light by means of one or more diffracting elements G02B26/0808; acousto-optical elements G02F1/11, G02F1/33; electro- or magneto-optical diffraction G02F1/292, G02F1/2955

Abstract

A light valve of deformable graftg tye and a metahod for light modulation using the light valves is provided. The light valve of deforable rating tpe, includes at least three beams, one beam of the at least tFee beams being of a substantially fixed-position, and at least two beams of tle at least three beams being deformable by electrostatic force in a substantially staircase structure, each step of the staicase creating a predefinied change in the phase of an Aching light beam, a first electrode and a second electrode, the electrodes ttansmitting electrostatic force to at least the deformiable beams of the at least three beams. The beam of a subsantially fixedposition tmay be defotiable by electrostatic force,

Claims

1. A light valve of deformable grating type, comprising:

at least three bem,, one beam of said at least three beams being of a substantially fixed-position, and at least two beams of said at least three beams being deformable by electrostatic force in a substantially staircase structure, each step of said staircase creating a predefined change in the phase of an impeaching light beam; and

a first electrode and a second electrode, said first and second electrodes transmitting electrostatic force to at least said deformable beams of said at least three beams.

2. The light valve of claim 1, wherein said deformable beams form said first electrode and said second electrode is common to all said deformable beams.

3. The light valve of claim 1, wherein said deformable beams form said first electrode and said second electrode comprises an array of electrodes, each electrode of said array of electrodes associated with one of said deformable beams.

4. The light valve of claim 1, wherein said first electrode comprises an array of electrodes, each electrode of said array of electrodes associated with one of said deformable beams, and said second electrode is common to all said deformable beams.

5. A Spatial light modulator formed as an arra y of light valves of claim 1.

6. A Spatial light modulator formed as a array of light valves of claim 2.

7. A Spatial light modulator formed as an array of light valves of claim 3.

8. A Spatial light modulator formed as an array of light valves of claim 4.

9. The light valve of claim 1, wherein said beam of a substantially fixed-position is deformable by electostatic force.

10. The light valve of claim 9, wherein said at least three beams form said first electrode and said second electrode is common to all said deformable beams.

11. The light valve of claim 9, wherein said at least three beams form said first electrode and said second electrode comprises an array of electrodes, each electrode of said array of electrodes associated with one of said at least three beams.

13. A Spatial light modulator formed as an array of light valves of claim 9.

14. A Spatial light modulator formed as an array of light valves of claim 10.

15. A Spatial light modulator formed as an array of light valves of claim 11.

16. A Spatial light modulator formed as an array of light valves of claim 12.

18. The light valve of claim 17, wherein said at least three beams form said first electrode and said second electrode is common to all said deformable beams.

19. The light valve of claim 17, wherein said at least three beams form said first electrode and said second electrode comprises an array of electrodes, each electrode of said a&

ray of electrodes associated with one of said at least three beams.

20. The light valve of claim 17, wherein said first electrode comprises an array of electrodes, each electrode of said array of electrodes associated with one of said at least three beams, and said second electrode is common to all said at least three beams.

21. A Spatial light modulator formed as an array of light valves of claim 17.

22. A Spatial light modulator formed as an array of light valves of claim 18.

23. A Spatial light modilator formed as an array of light valves of claim 19.

24. A Spatial light modulator formed as an array of light valves of claim 20.

26. A method according to claim 25, wherein all said defoxable beams form said first electrode and wherein said second electrode is common to all said deformable beams.

27. A method according to claim 25, wherein said deformable beams form said first electrode and said second electrode comprises an array of electrodes, each electrode of said aray of electrodes associated with one of said deformable beam.

28. A method according to claim 25, wherein said first electrode comprises an array of electrodes, each electrode of said array of electrodes associated with one of said deformable beams, and said second electrode is common to all said deformable beams.

29. A method according to claim 25, wherein said beam of a substantially fixed-position is deformable by electrostatic force.

30. A method according to claim 29, wherein all said at least three beams form said first electrode and wherein said second electrode is common to all said at least three beams.

31. A method according to claim 29, whetein said at least three beams form said first electrode and said second electrode comprises an array of electrodes, each electrode of said array of electrodes associated with one of said at least three beam.

32. A method according to claim 29, wherein said first electrode comprises an array of electrodes, each electrode of said array of electrodes associated with one of said at least three beams, and said second electrode is common to all said at least three beams.

12. The light valve of Clailn 9, wherein said first electrode comprises an array of electrodes, each electrode of said array of electrodes associated with one of said at least three beams, and said second electrode is common to all said at least three beams.

17. A light valve of deformnable grating type, comprising:

at least three beams, one beam of said at least three beams being of a substantially fixed-position, and said at least thtee beams being deformable by electrostatic force in a substantially staircase strucure, each step of said staircase creating a predefined change in the phase of an impeachhlg light beam; and

a first electrode and a second electrode, said first and second electrodes transmitting electrostatic force to at least said deformable beams of said at least three beams.

25. A method for light modulation, comprising the steps of:

providing a light valve of deformable grating type, said light valve comprising at least three beams, at least the first beam of said at least three beams being of a substantially fixed-positior4 and at least two beams of said at least three beams being defonnable by electrostatic force in a substantially staircase structure, each step of said staircase creating a predefined change in the phase of an impeaching light beam;

illuminating said light valve; and

applying voltage between said first electrode and said second electrode.

33. A method for light modulation, comprising the steps of:

providing a light valve of deformable grating type, said light valve comprising at least three beams, at least the first beam of said at least three beams being of a substantially fixed-position, and said at least three beams being deformable by electrostatic force in a substantially staircase structure, each step of said staircase creating a predefined change in the phase of an impeaching light beam;

illuminating said light valve; and

applying voltage between said fist electrode and said second electrode.

34. A mettod according to claim 33, wherein all said at least three beams form said first electrode and wherein said second electrode is common to all said at least three beams.

35. A method according to claim 33, wherein said at least three beams form said first electrode and said second electrode comprises an array of electrodes, each electrode of said array of electrodes associated with one of said at least three beam.

36. A method according to claim 33, wherein said first electrode comprises an array of electrodes, each electrode of said array of electrodes associated with one of said at least Ftee beams, and said second electrode is common to all said at least three beams.