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Blazed micro-mechanical light modulator and array thereof

  • US 20020021485A1
  • Filed: 07/11/2001
  • Published: 02/21/2002
  • Est. Priority Date: 07/13/2000
  • Status: Active Grant
First Claim
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1. A light valve of deformable grating type, comprising:

  • at least three bem,, one beam of said at least three beams being of a substantially fixed-position, and at least two beams of said at least three beams being deformable by electrostatic force in a substantially staircase structure, each step of said staircase creating a predefined change in the phase of an impeaching light beam; and

    a first electrode and a second electrode, said first and second electrodes transmitting electrostatic force to at least said deformable beams of said at least three beams.

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