Micro-fluidic cell for optical detection of gases and method for producing same
First Claim
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1. A micro-fluidic cell for optical detection of gases, comprising:
- a microchannel through which gases to be analyzed flow;
a concentration cell; and
a detection cell, and wherein said microchannel through which gases to be analyzed flow comprises a first microchannel including a gas inlet, a second microchannel including a gas outlet, and a connecting channel which connects said first microchannel and said second microchannel, said concentration cell has said first microchannel, a substance adapted to adsorb and desorb the gases to be analyzed, and provided in part of said first microchannel, and a heating source for heating said substance for adsorbing and desorbing the gases to be analyzed, and said detection cell has said second microchannel, an optical fiber for entry of ultraviolet light for spectrophotometric analysis into said second microchannel, and an optical fiber for exit of the ultraviolet light for spectrophotometric analysis from said second microchannel.
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Abstract
A micro-fluidic cell for optical detection of gases provided according to the present invention includes a concentration cell and a detection cell, and increases the sensitivity of optical detection of gases, selectivity of components, and accuracy of quantitative determination, and also achieves a low electric power consumption and a small-sized, light-weight configuration of the entire apparatus.
20 Citations
35 Claims
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1. A micro-fluidic cell for optical detection of gases, comprising:
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a microchannel through which gases to be analyzed flow;
a concentration cell; and
a detection cell, and wherein said microchannel through which gases to be analyzed flow comprises a first microchannel including a gas inlet, a second microchannel including a gas outlet, and a connecting channel which connects said first microchannel and said second microchannel, said concentration cell has said first microchannel, a substance adapted to adsorb and desorb the gases to be analyzed, and provided in part of said first microchannel, and a heating source for heating said substance for adsorbing and desorbing the gases to be analyzed, and said detection cell has said second microchannel, an optical fiber for entry of ultraviolet light for spectrophotometric analysis into said second microchannel, and an optical fiber for exit of the ultraviolet light for spectrophotometric analysis from said second microchannel. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12, 13, 14, 15, 18, 19, 20, 21, 22, 24, 25, 26, 27, 28, 30, 31, 32, 33, 34)
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16. A gas trapping cell comprising:
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a microchannel having a gas inlet and a gas outlet port and permitting flow of gases to be analyzed;
a substance provided in part of said microchannel and adapted to adsorb and desorb the gases to be analyzed;
a heating source for heating said substance for adsorbing and desorbing the gases to be analyzed; and
a microchannel for cold-trapping the gases to be analyzed which have been desorbed from said substance for adsorption and desorption provided in part of said microchannel.
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17. A method for producing a micro-fluidic cell for optical detection of gases, comprising the steps of:
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forming a trench in a continuous pattern including an adsorbent stopper step on a top side of a first substrate;
loading a substance for adsorbing and desorbing gases into part of the trench;
connecting an optical fiber for entry of ultraviolet light for spectrophotometric analysis and an optical fiber for exit of the ultraviolet light for spectrophotometric analysis with a predetermined spacing in the trench by use of an sealing material comprising glass;
bonding a second flat substrate to the top side of the first substrate by bonding to form a microchannel in the trench; and
providing a heater on a bottom side of the first substrate and at a position corresponding to a portion loaded with the substance for adsorbing and desorbing the gases.
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23. A method for producing a micro-fluidic cell for optical detection of gases, comprising the steps of:
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forming a trench in a continuous pattern including an adsorbent stopper step on a top side of a first substrate;
loading a substance for adsorbing and desorbing gases into part of the trench;
forming a trench in a predetermined continuous pattern on a top side of a second substrate and a through-hole in the trench;
connecting an optical fiber for entry of ultraviolet light for spectrophotometric analysis and an optical fiber for exit of the ultraviolet light for spectrophotometric analysis with a predetermined spacing in the trench of the second substrate by use of an sealing material comprising glass;
bonding a third flat substrate to the top side of the second substrate by bonding to form a microchannel in the trench of the second substrate;
bonding a bottom side of the second substrate to the top side of the first substrate by bonding to form a microchannel in the trench of the first substrate; and
providing a heater on a bottom side of the first substrate and at a position corresponding to a portion loaded with the substance for adsorbing and desorbing the gases.
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29. A method for producing a micro-fluidic cell for optical detection of gases, comprising the steps of:
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forming a trench in a continuous pattern including an adsorbent stopper step on a top side of a first substrate;
loading a substance for adsorbing and desorbing gases into part of the trench;
bonding a second flat substrate having a through-hole at a position corresponding to the trench of the first substrate to the top side of the first substrate by bonding to form a microchannel in the trench of the first substrate;
providing a heater on a bottom side of the first substrate and at a position corresponding to a portion loaded with the substance for adsorbing and desorbing the gases;
forming a trench in a predetermined continuous pattern on a top side of a third substrate and a through-hole in the trench;
connecting an optical fiber for entry of ultraviolet light for spectrophotometric analysis and an optical fiber for exit of the ultraviolet light for spectrophotometric analysis with a predetermined spacing in the trench of the third substrate by use of an sealing material comprising glass;
bonding a fourth flat substrate having a through-hole at a position corresponding to the trench of the third substrate to the top side of the third substrate by bonding to form a microchannel in the trench of the third substrate; and
stacking a fifth substrate comprising a Teflon seal packing interposed between the second substrate and the third substrate and having a through-hole at a position corresponding to the through-hole of the second substrate and the through-hole of the fourth substrate.
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35. An apparatus for optical detection of gases, comprising:
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a micro-fluidic cell for optical detection of gases, including a microchannel through which gases to be analyzed flow, a concentration cell, and a detection cell;
a heater power source;
an ultraviolet light source;
an ultraviolet spectrophotometer; and
a controller, and wherein said microchannel through which the gases to be analyzed flow comprises a first microchannel including a gas inlet, a second microchannel including a gas outlet, and a connecting channel which connects said first microchannel and said second microchannel, said concentration cell has said first microchannel, a substance adapted to adsorb and desorb the gases to be analyzed, and provided in part of said first microchannel, and a heating source for heating said substance for adsorbing and desorbing the gases to be analyzed, and said detection cell has said second microchannel, an optical fiber for entry of ultraviolet light for spectrophotometric analysis into said second microchannel, and an optical fiber for exit of the ultraviolet light for spectrophotometric analysis from said second microchannel.
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Specification