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MICROELECTROMECHANICALLY TUNABLE, CONFOCAL, VERTICAL CAVITY SURFACE EMITTING LASER AND FABRY-PEROT FILTER

  • US 20020031155A1
  • Filed: 06/26/1998
  • Published: 03/14/2002
  • Est. Priority Date: 06/26/1998
  • Status: Active Grant
First Claim
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1. A method for introducing a pre-selected amount, and type, of strain into the quantum wells of a pre-grown crystalline semiconductor material, said method comprising the steps of:

  • providing a member formed of said crystalline semiconductor material, said member having an upper surface and defining multiple quantum wells; and

    depositing at least one thin film layer on said upper surface of said member, said at least one thin film layer containing a pre-selected amount, and type, of strain, said type of strain in said at least one thin film layer being the opposite type to that desired to be introduced into said member.

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