×

Stacked micromirror structures

  • US 20020034024A1
  • Filed: 09/18/2001
  • Published: 03/21/2002
  • Est. Priority Date: 09/20/2000
  • Status: Abandoned Application
First Claim
Patent Images

1. A mirror assembly, comprising:

  • a package body;

    a lower mirror element comprising;

    a central mounting element;

    a frame portion surrounding the central mounting element, coupled to the central mounting element by a plurality of hinges, and mounted to the package body;

    a standoff attached on one end to the central mounting element;

    an upper mirror attached to another end of the standoff; and

    a plurality of drive elements for orienting the upper mirror responsive to electrical signals.

View all claims
  • 1 Assignment
Timeline View
Assignment View
    ×
    ×