Stacked micromirror structures
First Claim
1. A mirror assembly, comprising:
- a package body;
a lower mirror element comprising;
a central mounting element;
a frame portion surrounding the central mounting element, coupled to the central mounting element by a plurality of hinges, and mounted to the package body;
a standoff attached on one end to the central mounting element;
an upper mirror attached to another end of the standoff; and
a plurality of drive elements for orienting the upper mirror responsive to electrical signals.
1 Assignment
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Accused Products
Abstract
A packaged micromirror assembly (10; 110) is disclosed. The assembly (10) includes a micromirror (70) formed of a lower element (60) having a central mounting portion (63) surrounded by an intermediate gimbal portion (62) and a frame portion (61). A magnet standoff (68) is attached to the central mounting portion (63) and an upper mirror surface (65) is attached to the magnet standoff (68). The micromirror (70) may be packaged into a body (30) with coil drivers (36). A magnetic field generated by the coil drivers (36) applies a torque to the magnet standoff (68) causing it to rotate; because of silicon hinges in the lower element (60), the upper mirror (65) can rotate in two axes. An alternative embodiment of the assembly (110) rotates a lower mirror element (130) and an upper mirror (15) attached thereto by a standoff (68) by way of an electrostatic force.
15 Citations
17 Claims
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1. A mirror assembly, comprising:
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a package body;
a lower mirror element comprising;
a central mounting element;
a frame portion surrounding the central mounting element, coupled to the central mounting element by a plurality of hinges, and mounted to the package body;
a standoff attached on one end to the central mounting element;
an upper mirror attached to another end of the standoff; and
a plurality of drive elements for orienting the upper mirror responsive to electrical signals. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8)
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9. A micromirror, comprising:
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a lower mirror element comprising;
a central mounting element;
a frame portion surrounding the central mounting element, coupled to the central mounting element by a plurality of hinges;
a standoff attached on one end to the central mounting element; and
an upper mirror attached to another end of the standoff. - View Dependent Claims (10, 11, 12, 13, 15, 16, 17)
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14. A method of fabricating a micromirror, comprising the steps of:
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forming an integrated lower mirror element from a single piece of silicon, the integrated lower mirror element having a central mounting element surrounded by an intermediate gimbal portion, which in turn is surrounded by a frame portion, the central mounting element, intermediate gimbal portion and frame portion coupled to one another by a plurality of hinges;
attaching one end of a standoff to the central mounting element;
forming an upper mirror element;
attaching the upper mirror element to another end of the standoff.
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Specification