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SPIN COATING METHOD AND COATING APPARATUS

  • US 20020037366A1
  • Filed: 03/27/2000
  • Published: 03/28/2002
  • Est. Priority Date: 09/27/1997
  • Status: Active Grant
First Claim
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1. A spin coating method for forming a thin film on the surface of a substrate by dropping a coating solution containing at least one solute and a solvent through a discharge nozzle onto the surface of a substrate to be coated, mounted on a horizontal turn table and turning the substrate, said method comprising soaking and holding a nozzle tip in a nozzle soaking solution containing at least one of said solute and the same solvent as said solvent or a solvent having a similar chemical structure to that of said solvent, after the coating solution is dropped through the nozzle.

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