SPIN COATING METHOD AND COATING APPARATUS
First Claim
1. A spin coating method for forming a thin film on the surface of a substrate by dropping a coating solution containing at least one solute and a solvent through a discharge nozzle onto the surface of a substrate to be coated, mounted on a horizontal turn table and turning the substrate, said method comprising soaking and holding a nozzle tip in a nozzle soaking solution containing at least one of said solute and the same solvent as said solvent or a solvent having a similar chemical structure to that of said solvent, after the coating solution is dropped through the nozzle.
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Accused Products
Abstract
There are provided a spin coating method and an apparatus for forming a thin film having a uniform thickness on a substrate at a low cost in a process for manufacturing semiconductors, optical disks and the like.
A coating solution is dropped onto the surface of a substrate (2) to be coated, mounted on a horizontal turn table (3) through a discharge nozzle (4) and the substrate is turned to form a thin film.
After the coating solution is dropped through the nozzle, a stand-by nozzle tip (4a) is soaked and held in a nozzle soaking solution (10) having a composition near or equivalent to that of the coating solution. The crystal deposition of the solute is suppressed. Inter alia, the present invention is useful when a solution containing a solute having high crystallizability is coated.
13 Citations
8 Claims
- 1. A spin coating method for forming a thin film on the surface of a substrate by dropping a coating solution containing at least one solute and a solvent through a discharge nozzle onto the surface of a substrate to be coated, mounted on a horizontal turn table and turning the substrate, said method comprising soaking and holding a nozzle tip in a nozzle soaking solution containing at least one of said solute and the same solvent as said solvent or a solvent having a similar chemical structure to that of said solvent, after the coating solution is dropped through the nozzle.
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8. A spin coating apparatus comprising a horizontal turn table on which a substrate to be coated is mounted and which turns the substrate and a discharge nozzle for dropping a coating solution onto the surface of a substrate, said apparatus comprising a nozzle soaking means for soaking and holding a nozzle tip after dropping of the coating solution in a nozzle soaking solution.
Specification