Method for beam control in a scanning microscope, arrangement for beam control in a scanning microscope, and scanning microscope
First Claim
Patent Images
1. A method for beam control in a scanning microscope, comprising the following steps:
- acquiring a preview image;
marking at least one region of interest in the preview image;
displacing a scan field onto the region of interest by means of a first beam deflection device; and
acquiring an image by meander-shaped scanning of the region of interest with a second beam deflection device.
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Abstract
A method and an arrangement for beam control in a scanning microscope are disclosed. The scanning microscope comprises means for acquiring and displaying (3) a preview image (7) and a microscope optical system (51). Means for marking (5) at least one region of interest (27, 29) in the preview image (7) are provided. A first beam deflection device (43, 67, 68) displaces the scan field (31, 33) onto the region of interest (27, 29); and a second beam deflection device (49, 72, 94) serves for meander-shaped scanning within the scan field (31, 33).
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Citations
23 Claims
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1. A method for beam control in a scanning microscope, comprising the following steps:
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acquiring a preview image;
marking at least one region of interest in the preview image;
displacing a scan field onto the region of interest by means of a first beam deflection device; and
acquiring an image by meander-shaped scanning of the region of interest with a second beam deflection device. - View Dependent Claims (2, 3, 4, 5)
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6. An arrangement for beam control comprising:
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a scanning microscope defining a scan field;
means for acquiring and displaying a preview image a microscope optical system;
means for marking at least one region of interest in the preview image;
a first beam deflection device for displacing the scan field onto the region of interest; and
a second beam deflection device for meander-shaped scanning within the scan field. - View Dependent Claims (7, 8, 9, 10, 11, 12, 13, 14, 16, 17, 18, 19, 20, 21, 22, 23)
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15. A scanning microscope comprising:
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an arrangement for beam control, means for acquiring and displaying a preview image a microscope optical system, means for marking at least one region of interest in the preview image, a first beam deflection device for displacing the scan field onto the region of interest; and
a second beam deflection device for meander-shaped scanning within the scan field.
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Specification