Apparatus for optical inspection of a working surface having a dynamic reflective spatial attenuator

• US 20020044278A1
• Filed: 07/13/2001
• Published: 04/18/2002
• Est. Priority Date: 07/12/2000
• Status: Active Grant

• Current Assignee: Tuan Le
• Original Assignee: Tuan Le
• Inventors: Le, Tuan
• Granted Patent: US 6,643,007 B2
• Time in Patent Office: Days
• US Class Current: 356/237.3
• CPC Class Codes: G01N 21/94 Investigating contamination, e.g. dust G01N21/85 takes precedence
• CPC Class Codes: G01N 21/9501 Semiconductor wafers manufacturing processes per se of semiconductor devices implementing a measuring step H01L22/10
• CPC Class Codes: G01N 21/95623 using a spatial filtering method per se G02B
• CPC Class Codes: G01N 2201/0675 SLM

Abstract

A dynamic reflective spatial attenuator for use in an optical inspection apparatus. The attenuator takes the form of a two-dimensional micro-mechanical reflective array that, in the first operative position of a mirror element, reflects the desired scattered light toward a detector and, in the second operative position of a mirror element, reflects undesired scattered light into a light dump. The mirror array'"'"'s fast response and flexibility allows for changes during mid-scan to increase the defect'"'"'s or contaminant'"'"'s signal relative to the substrate surface'"'"'s signal.

Claims

1. An optical surface inspection apparatus for determining the presence of unknown surface conditions on a target surface, comprising:

illumination means for generating an incidence light beam;

scanning means for scanning the light beam across the target surface, whereby the target surface scatters light in the presence of the light beam;

light collection means for collecting scattered light, said light collection means comprises;

(a) detector means for detecting light;

(b) a dynamic reflective spatial attenuator receiving scattered light from the target surface;

(c) control means for controlling the dynamic reflective spatial attenuator to obtain an attenuation pattern that selectively diverts light to the detector means;

discriminating means for determining the presence of unknown surface conditions based on the light detected by the detector means.

2. The apparatus of claim 1, wherein the dynamic reflective spatial attenuator comprises an array of reflective elements.

3. The apparatus of claim 2, wherein the reflective elements are individually controllable to divert light to desired directions.

4. The apparatus of claim 3, wherein the dynamic reflective spatial attenuator comprises a micro-mechanical array of reflective elements.

5. The apparatus of claim 4, wherein the reflective elements are movable from a first position in which light is diverted to the detector means and a second position in which light is diverted away from the detector means.

6. The apparatus of claim 5, wherein the control means controls the dynamic reflective spatial attenuator in a manner such that a predetermined number of reflective elements are in the second position so as to attenuate light intensity of the scattered light from the target surface.

7. The apparatus of claim 6, wherein the control means controls the dynamic reflective spatial attenuator in a manner such that a predetermined number of the reflective elements are periodically positioned in the first and second positions.

8. The apparatus of claim 7, wherein the reflective elements are periodically positioned in the first and second positions in regular cycles.

9. The apparatus of claim 7, wherein the reflective elements are periodically positioned in the first and second positions in irregular cycles.

10. The apparatus of claim 6, wherein the reflective elements in the first position and the reflective elements in the second position are distributed in a regular attenuation pattern within the array.

11. The apparatus of claim 6, wherein the reflective elements in the first position and the reflective elements in the second position are distributed in an irregular attenuation pattern within the array.

12. The apparatus of claim 6, wherein the control means controls the reflective elements to distribute the reflective elements in the second position to obtain an attenuation pattern in the array to correspond to an expected Fourier diffraction pattern from the target surface, wherein Fourier diffraction is diverted away from the detector means.

13. The apparatus of claim 1, wherein the control means controls the reflective elements to obtain an attenuation pattern that filters Fourier diffraction patterns created by regular periodic surface features on the target surface.

14. The apparatus of claim 1, wherein the control means controls the reflective elements to obtain an attenuation pattern that varies collection angle of the collection optics with respect to the illumination means.

15. The apparatus of claim 14, wherein the attenuation pattern comprises of at least one band of reflective elements that is in the second position.

16. The apparatus of claim 15, wherein the attenuation pattern comprises of at least one column of reflective elements that is in the second position, with reference to the target surface.

17. The apparatus of claim 1, wherein the control means controls the reflective elements to obtain an attenuation pattern that varies collection angle of the collection optics with respect to the target surface.

18. The apparatus of claim 17, wherein the attenuation pattern comprises of rows of reflective elements that are in the second position, with reference to the target surface.

19. The apparatus of claim 3, wherein the dynamic reflective spatial attenuator comprises an array of reflective liquid crystal elements.

20. The apparatus of claim 1, wherein the light collection means further comprises a light dump, wherein the control means further controls the dynamic reflective spatial attenuator to selectively divert scattered light towards the light dump and the detector means.

21. A process of inspecting a specimen to determine the presence of unknown surface conditions on a target surface, comprising the steps:

scanning an incidence light beam across the target surface, whereby the target surface scatters light in the presence of the light beam;

collecting scattered light by applying a dynamic reflective spatial attenuator to obtain an attenuation pattern that selectively diverts light to a detector;

determining the presence of unknown surface conditions based on the light detected by the detector means.

22. A process as in claim 21, further comprising the step of calibrating the scattered light detected from a known test surface, wherein the determining step compares the light scattered from the target surface to the light scattered from the test surface.

23. A process as in claim 22, wherein the calibrating step optimizes the intensity of the scattered light from the test surface to be detected by the detector by varying the attenuation pattern.

24. A process as in claim 23, wherein the collecting step applies the same attenuation pattern as for the test surface.

25. A process as in claim 24, wherein the attenuation pattern applied at each scan spot along a scan across the target surface can vary between adjacent spots.