Reflection type diffraction grating
First Claim
1. In a diffraction grating having a groove period which is 0.1 to 10 times as large as a wavelength of incident light, a reflection type diffraction grating comprising a laminate of a metal film as a first layer with reflectance not lower than 30% and a transparent dielectric film as a second layer, said first and second layers being laminated in order on a surface side of said first-mentioned diffraction grating.
1 Assignment
0 Petitions
Accused Products
Abstract
A reflection type diffraction grating according to the present invention has a structure in which a metal film as a first layer with reflectance not lower than 30% with respect to the wavelength of incident light and a transparent dielectric film as a second layer are laminated successively on the surface of the reflection type diffraction grating. With respect to the wavelength of incident light, the metal film has a refractive index selected to be not higher than 1.5 and an extinction coefficient selected to be not smaller than 6.0. The transparent dielectric film has a refractive index selected to be in a range of from 1.30 to 1.46, both inclusively, with respect to the wavelength of incident light and has an optical film thickness selected to be in a range of from 0.20λ to 0.38λ, both inclusively, when λis the wavelength of incident light.
-
Citations
9 Claims
- 1. In a diffraction grating having a groove period which is 0.1 to 10 times as large as a wavelength of incident light, a reflection type diffraction grating comprising a laminate of a metal film as a first layer with reflectance not lower than 30% and a transparent dielectric film as a second layer, said first and second layers being laminated in order on a surface side of said first-mentioned diffraction grating.
-
5. A diffraction grating comprising:
-
a substrate defining a fine roughness structure on a surface, said fine roughness structure being constructed by a large number of fine grooves arranged periodically;
a transparent dielectric layer provided to said substrate as an exposed surface;
at least one metal layer provided to said substrate to be located between said dielectric layer and said fine roughness structure; and
reflectance of said metal layer is not lower than 30%. - View Dependent Claims (6, 7, 8, 9)
-
Specification