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Reflection type diffraction grating

  • US 20020044359A1
  • Filed: 09/17/2001
  • Published: 04/18/2002
  • Est. Priority Date: 09/21/2000
  • Status: Active Grant
First Claim
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1. In a diffraction grating having a groove period which is 0.1 to 10 times as large as a wavelength of incident light, a reflection type diffraction grating comprising a laminate of a metal film as a first layer with reflectance not lower than 30% and a transparent dielectric film as a second layer, said first and second layers being laminated in order on a surface side of said first-mentioned diffraction grating.

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