Electrostatic chuck
First Claim
1. An electrostatic chuck provided with a pair of insulating members disposed in mutual opposition between which an electrode is interposed;
- wherein, a first insulating member of the pair of insulating members at least on the side on which a fixed substrate is placed is composed of a compound sintered body having for its main components 4% by weight to 12% by weight of silicon carbide particles and aluminum particles, and the first insulating member has varistor characteristics.
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Accused Products
Abstract
The present invention provides an electrostatic chuck that is able to completely prevent abnormal discharge that not only causes damage and destruction of the electrostatic chuck, but also causes damage of the fixed substrate as well as the generation of particles.
In the electrostatic chuck of the present invention, at least a first insulating member, on the side on which a fixed substrate is placed among a first insulating member and second insulating member disposed in mutual opposition between which an electrode is interposed, is composed of a compound sintered body having for its main components 4% by weight to 12% by weight silicon carbide particles and aluminum oxide particles, and the first insulating member has varistor characteristics such that the volumetric specific resistance value of the first insulating member is from 1×109 to 1×1012 Ω· cm when the potential difference between the surface of the first insulating member on which the fixed substrate is placed and the electrode is 1000 V or less, and from 1×107 to 1×108 Ω· cm when the potential difference between the surface of the first insulating member on the side on which the fixed substrate is placed and the electrode is 3000 V or more.
5 Citations
9 Claims
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1. An electrostatic chuck provided with a pair of insulating members disposed in mutual opposition between which an electrode is interposed;
- wherein,
a first insulating member of the pair of insulating members at least on the side on which a fixed substrate is placed is composed of a compound sintered body having for its main components 4% by weight to 12% by weight of silicon carbide particles and aluminum particles, and the first insulating member has varistor characteristics. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9)
- wherein,
Specification