Method, computer readable medium and apparatus for accessing a defect knowledge library of a defect source identification system

• US 20020046001A1
• Filed: 07/13/2001
• Published: 04/18/2002
• Est. Priority Date: 10/16/2000
• Status: Abandoned Application

• Current Assignee: Applied Materials Incorporated
• Original Assignee: Applied Materials Incorporated
• Inventors: Radzinski, Maya, Dor, Amos
• Application Number:
  US09/905,514
• Publication Number:
  US 20020046001A1
• Time in Patent Office: Days
• US Class Current: 702/179
• CPC Class Codes: G06Q 30/02 Marketing; Price estimation or determination; Fundraising
• CPC Class Codes: G06Q 50/04 Manufacturing
• CPC Class Codes: H01L 22/20 Sequence of activities consisting of a plurality of measurements, corrections, marking or sorting steps
• CPC Class Codes: Y02P 90/30 Computing systems specially adapted for manufacturing

Abstract

A method, computer readable medium and apparatus comprising a defect knowledge library (DKL), subscriber equipment and a communications network that connects the subscriber equipment t the DKL. The DKL contains a partitioned database of defect, defect source and defect mitigation information that is arranged by participating integrated circuit fabricator (referred to herein as a subscriber). The subscribers can identify the amount and type of information that they wish to share with other subscribers and whether their identity will be disclosed. The subscribers may share the data with specific “partners” or with other departments within their company, without sharing with other subscribers. The DKL system administrator charges a fee for the access rights. The more information that a subscriber shares with other subscribers, the lower the access fee. As such, subscribers are given financial incentive to share their information with other subscribers. Additionally, if a subscriber shares with others, then the other subscriber'"'"'s data is made available to the sharing subscriber. As such, by sharing data, a particular subscriber has access to an expended library of DSI data without the need to accumulate the data themselves.

Claims

1. A method for accessing a defect knowledge library of a defect source identification system comprising:

supplying information to the defect knowledge library from a plurality of subscribers, where a particular subscriber establishes a data sharing level that defines an amount of the information that is supplied that can be shared with other subscribers; and

establishing, for the particular subscriber, an access price and an access level for accessing the defect knowledge library that is based upon a data sharing level of that particular subscriber.

2. The method of claim 1 wherein at least one of the plurality of subscribers is an integrated circuit manufacturer.

3. The method of claim 1 wherein the information comprises one or more of defect data, defect source data, defect mitigation information.

4. The method of claim 1 wherein the access price for the particular subscriber is decreased when the particular subscriber authorizes sharing of their information with other subscribers, where the more information that is shared correspondingly reduces the access price.

5. The method of claim 1 wherein the access level controls the amount of information the particular subscriber can access of other subscribers, where the higher the access level the more information that the particular subscriber can access.

6. The method of claim 5 wherein the access level for the particular subscriber is increased when the particular subscriber authorizes sharing of their information with other subscribers, where the more information that is shared correspondingly increases the access level.

17. The apparatus of claim 1 wherein the access level controls the amount of information the particular subscriber can access of other subscribers, where the higher the access level the more information that the particular subscriber can access.

7. A computer readable medium containing a software routine that, when executed by a processor, causes a system to perform a method for accessing a defect knowledge library of a defect source identification system, the method comprises:

supplying information to the defect knowledge library from a plurality of subscribers, where a particular subscriber establishes a data sharing level that defines an amount of the information that is supplied that can be shared with other subscribers; and

establishing, for the particular subscriber, an access price and an access level for accessing the defect knowledge library that is based upon a data sharing level of that particular subscriber.

8. The method of claim 7 wherein at least one of the plurality of subscribers is an integrated circuit manufacturer.

9. The method of claim 7 wherein the information comprises one or more of defect data, defect source data, defect mitigation information.

10. The method of claim 7 wherein the access price for the particular subscriber is decreased when the particular subscriber authorizes sharing of their information with other subscribers, where the more information that is shared correspondingly reduces the access price.

11. The method of claim 7 wherein the access level controls the amount of information the particular subscriber can access of other subscribers, where the higher the access level the more information that the particular subscriber can access.

12. The method of claim 11 wherein the access level for the particular subscriber is increased when the particular subscriber authorizes sharing of their information with other subscribers, where the more information that is shared correspondingly increases the access level.

14. The apparatus of claim 13 wherein at least one of the plurality of subscribers is an integrated circuit manufacturer.

15. The apparatus of claim 13 wherein the information comprises one or more of defect data, defect source data, defect mitigation information.

16. The apparatus of claim 15 wherein the access price for the particular subscriber is decreased when the particular subscriber authorizes sharing of their information with other subscribers, where the more information that is shared correspondingly reduces the access price.

18. The method of claim 17 wherein the access level for the particular subscriber is increased when the particular subscriber authorizes sharing of their information with other subscribers, where the more information that is shared correspondingly increases the access level.

13. Apparatus for accessing a defect knowledge library of a defect source identification system comprising:

subscriber equipment for supplying information to the defect knowledge library from a plurality of subscribers, where a particular subscriber establishes a data sharing level that defines an amount of the information that is supplied that can be shared with other subscribers; and

a server computer within the defect knowledge library for establishing, for the particular subscriber, an access price and an access level for accessing the defect knowledge library that is based upon a data sharing level of that particular subscriber.