Micromachined devices with stop members
First Claim
Patent Images
1. A micromachined device comprising:
- a substrate;
a micromachined first body suspended over the substrate in a plane parallel to the substrate and movable in the plane relative to the substrate; and
a first stop member adjacent the first body and anchored to the substrate, the stop member having a first portion coplanar with the body for limiting motion in the plane of the body, and a second portion extending over the body for physically limiting movement of the body both orthogonal to the plane and away from the substrate.
0 Assignments
0 Petitions
Accused Products
Abstract
A micromachined gyroscope has first and second coplanar bodies suspended over a substrate and movable in their plane relative to the substrate. The first body is dithered along a dither axis and is movable relative to the second body on the dither axis, but is rigidly connected for movement along an axis transverse to the dither axis. The second body is anchored so that it is substantially inhibited from moving along the dither axis, but can move with the first body along the transverse axis. The gyro has stop members and an anti-levitation system for preventing failure.
6 Citations
18 Claims
-
1. A micromachined device comprising:
-
a substrate;
a micromachined first body suspended over the substrate in a plane parallel to the substrate and movable in the plane relative to the substrate; and
a first stop member adjacent the first body and anchored to the substrate, the stop member having a first portion coplanar with the body for limiting motion in the plane of the body, and a second portion extending over the body for physically limiting movement of the body both orthogonal to the plane and away from the substrate. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12, 13, 14, 15, 16, 18)
-
-
17. A micromachined device comprising:
-
a substrate;
a micromachined first body suspended over the substrate in a plane parallel to the substrate and movable in the plane relative to the substrate along a first direction; and
means for physically limiting motion of the body in the plane along a second direction orthogonal to the first direction and in a direction orthogonal to the plane and away from the substrate.
-
Specification