High performance magnetron for DC sputtering systems

• US 20020046945A1
• Filed: 06/06/2001
• Published: 04/25/2002
• Est. Priority Date: 10/28/1999
• Status: Abandoned Application

• Current Assignee: Applied Materials Incorporated
• Original Assignee: Applied Materials Incorporated
• Inventors: Hosokawa, Akihiro, Mullapudi, Ravi
• Application Number:
  US09/875,816
• Publication Number:
  US 20020046945A1
• Time in Patent Office: Days
• US Class Current: 204/298.18
• CPC Class Codes: C23C 14/352 using more than one target C23C14/56 takes precedence
• CPC Class Codes: C23C 14/56 Apparatus specially adapted for continuous coating; Arrangements for maintaining the vacuum, e.g. vacuum locks
• CPC Class Codes: H01J 37/3405 Magnetron sputtering
• CPC Class Codes: H01J 37/3408 Planar magnetron sputtering
• CPC Class Codes: H01J 37/3447 Collimators, shutters, apertures

Abstract

A sputter deposition apparatus and method includes perimeter magnets oriented an angle relative to the plane of the sputter target, either by magnetizing or by physically orienting the magnets at the chosen angle. The resulting magnetic flux extends radially outward, away from the central axis of the target, toward and beyond the target perimeter. This causes the return path of the flux to pass over the target surface more parallel to the plane of its sputtering surface. This spreads sputter erosion over a greater area of the target surface and mitigates development of sputtering grooves. Since target erosion is more uniform, more target material is used for sputter deposition, deterring waste. Each target can be used longer before the target material is penetrated, resulting in fewer target replacement cycles for a given volume of workpiece coating, raising the deposition chamber capacity factor.

Claims

1. An apparatus for sputter deposition of material from a sputtering target onto a substrate, comprising:

a first sputtering target having a perimeter, a front surface and a rear surface opposite the front surface;

a first set of one or more inner magnetic poles, each having the same polarity, mounted adjacent the rear surface;

a first set of one or more outer magnetic poles, each having a polarity opposite the polarity of the inner magnetic poles, mounted adjacent the rear surface juxtaposed to the perimeter of the first target, wherein

the first set of outer magnetic poles collectively encircles the first set of inner magnetic poles; and

each one of the outer magnetic poles is magnetized at an acute magnetization angle relative to the front surface.

2. Apparatus according to claim 1 wherein:

each one of the inner magnetic poles is magnetized in a direction perpendicular to the front surface.

3. Apparatus according to claim 1 wherein:

the magnetization angle of the outer magnetic poles is between thirty and sixty degrees, inclusive, relative to the front surface.

4. Apparatus according to claim 3 wherein:

the magnetization angle of the outer magnetic poles is directed radially outward and away from the inner magnetic poles.

5. Apparatus according to claim 1 wherein:

the magnetization angle of the outer magnetic poles is between thirty and sixty degrees, inclusive, relative to the front surface; and

each one of the inner magnetic poles is magnetized in a direction perpendicular to the front surface.

6. Apparatus according to claim 1 wherein:

the magnetization angle of each of the outer magnetic poles causes magnetic flux from that magnetic pole to be directed radially outward and away from the inner magnetic poles.

7. Apparatus according to claim 6 wherein:

the magnetization angle of each of the outer magnetic poles causes magnetic flux from that magnetic pole be directed beyond the perimeter of the first target.

8. Apparatus according to claim 1 wherein:

the magnetization angle of each of the outer magnetic poles causes magnetic flux from the first set of outer magnetic poles to be oriented substantially parallel to the front surface of the first target.

9. Apparatus according to claim 1 wherein:

the magnetization angle of the outer magnetic poles is between thirty and sixty degrees, inclusive, relative to the front surface, and directed radially outward and away from the inner magnetic poles;

magnetic flux from the outer magnetic poles is substantially parallel to the front surface of the first target; and

each one of the inner magnetic poles is magnetized in a direction perpendicular to the front surface.

10. Apparatus according to claim 1 wherein:

the rear surface is directed generally upward; and

the front surface is directed generally downward toward the substrate.

11. Apparatus according to claim 10 wherein:

the magnetization angle of the outer magnetic poles is between thirty and sixty degrees, inclusive, relative to the front surface; and

each one of the inner magnetic poles is magnetized in a direction perpendicular to the front surface.

12. Apparatus according to claim 10 wherein:

the magnetization angle of each of the outer magnetic poles causes magnetic flux from that magnetic pole to be directed radially outward and away from the inner magnetic poles.

13. Apparatus according to claim 12 wherein:

the magnetization angle of each of the outer magnetic poles causes magnetic flux from that magnetic pole be directed beyond the perimeter of the first target.

14. Apparatus according to claim 10 and further comprising:

a vacuum chamber enclosing the first target; and

a workpiece support for positioning a substrate at one or more workpiece positions within the vacuum chamber, wherein said one or more workpiece positions include one or more workpiece positions that are below the first target.

15. Apparatus according to claim 10 wherein:

the front surface is tilted at an angle in the range of 30 to 60 degrees, inclusive, relative to a vertical line.

16. Apparatus according to claim 15 wherein:

the magnetization angle of the outer magnetic poles is between thirty and sixty degrees, inclusive, relative to the front surface; and

each one of the inner magnetic poles is magnetized in a direction perpendicular to the front surface.

17. Apparatus according to claim 15 wherein:

the magnetization angle of each of the outer magnetic poles causes magnetic flux from that magnetic pole to be directed radially outward and away from the inner magnetic poles.

18. Apparatus according to claim 17 wherein:

the magnetization angle of each of the outer magnetic poles causes magnetic flux from that magnetic pole be directed beyond the perimeter of the first target.

19. Apparatus according to claim 10 wherein:

the first sets of inner and outer magnetic poles are mounted so that the collective average distance between them and the front surface of the first target is less than half the width of the front surface of the first target.

20. Apparatus according to claim 19 wherein:

the front surface is tilted at an angle in the range of 30 to 60 degrees, inclusive, relative to a vertical line.

21. Apparatus according to claim 19 wherein:

the magnetization angle of the outer magnetic poles is between thirty and sixty degrees, inclusive, relative to the front surface.

22. Apparatus according to claim 19 wherein:

the magnetization angle of the outer magnetic poles is directed radially outward and away from the inner magnetic poles.

23. Apparatus according to claim 19 wherein:

the magnetization angle of each of the outer magnetic poles causes magnetic flux from the first set of outer magnetic poles to be oriented substantially parallel to the front surface of the first target.

24. Apparatus according to claim 1 and further comprising

a second sputtering target having a second perimeter, a second front surface and a second rear surface opposite the second front surface;

a second set of one or more inner magnetic poles, each having the same polarity, mounted adjacent the second rear surface;

a second set of one or more outer magnetic poles, each having a polarity opposite the polarity of the inner magnetic poles, mounted adjacent the second rear surface juxtaposed to the second perimeter, wherein

the second set of outer magnetic poles collectively encircles the second set of inner magnetic poles; and

each one of the outer magnetic poles of the second set of outer magnetic poles is magnetized at an acute magnetization angle relative to the second front surface.

25. Apparatus according to claim 24 wherein:

the magnetization angles of the first and second sets of outer magnetic poles are between thirty and sixty degrees, inclusive, relative to the front surfaces of the first and second targets, respectively, and directed radially outward and away from the respective sets of inner magnetic poles;

magnetic flux from the first and second sets of outer magnetic poles is substantially parallel to the front surface of the first and second targets respectively; and

each one of the inner magnetic poles of the first and second sets of inner magnetic poles is magnetized in a direction perpendicular to the front surface of the first and second targets respectively.

26. Apparatus according to claim 24 wherein:

the rear surface of each target is directed generally upward; and

the front surface of each target is directed generally downward toward the substrate.

27. Apparatus according to claim 26 wherein:

the first and second targets are oriented symmetrically relative to, and on opposite sides of, a vertical plane of symmetry, so that the front surface of each target is oriented toward the front surface of the other target.

28. Apparatus according to claim 26 wherein:

each of the first and second targets is oriented at an orientation angle relative to the vertical plane that is equal and opposite the orientation angle of the other target.

29. Apparatus according to claim 29 wherein:

the orientation angles of the first and second targets are in the range of 30 to 60 degrees, inclusive, relative to said vertical plane.

30. Apparatus according to claim 26 and further comprising:

a vacuum chamber enclosing the first and second targets; and

a workpiece support for positioning an electronic substrate at one or more workpiece positions within the vacuum chamber, wherein said one or more workpiece positions include one or more workpiece positions that are below the first target and one or more workpiece positions that are below the second target.

31. Apparatus according to claim 30 wherein:

the first and second targets are oriented symmetrically relative to, and on opposite sides of, a vertical plane of symmetry, so that the front surface of each target is oriented toward the front surface of the other target.

32. Apparatus according to claim 26 wherein:

the magnetization angles of the first and second sets of outer magnetic poles is between thirty and sixty degrees, inclusive, relative to the front surfaces of the first and second targets respectively; and

each one of the inner magnetic poles of the first and second sets of inner magnetic poles is magnetized in a direction perpendicular to the front surface of the first and second targets respectively.

33. Apparatus according to claim 26 wherein:

the magnetization angles of each of the outer magnetic poles of the first and second sets of magnetic poles causes magnetic flux from the first and second sets of magnetic poles respectively to be directed radially outward and away from the inner magnetic poles of the first and second sets of inner magnetic poles.

34. Apparatus according to claim 33 wherein:

the magnetic flux from the first and second sets of outer magnetic poles is directed beyond the perimeter of the first and second targets respectively.

36. A method according to claim 35 and further comprising the step of:

positioning the substrate at one or more workpiece positions within the vacuum chamber, wherein said one or more workpiece positions include one or more workpiece positions that are below the first target.

37. A method according to claim 35, further comprising the steps of:

mounting a second sputtering target within the vacuum chamber, the second target having second perimeter, second front surface and a second rear surface opposite the second front surface;

mounting a second set of one or more inner magnetic poles, each having the same polarity, adjacent the second rear surface;

mounting a second set of one or more outer magnetic poles, each having a polarity opposite the polarity of the inner magnetic poles, adjacent the second rear surface and the perimeter of the second target, wherein

the second set of outer magnetic poles collectively encircles the second set of inner magnetic poles; and

each one of the outer magnetic poles of the second set is magnetized at an acute magnetization angle relative to the front surface of the second target; and

sputtering material from the second target onto the substrate.

38. A method according to claim 35 and further comprising the step of:

positioning the substrate at one or more workpiece positions within the vacuum chamber, wherein said one or more workpiece positions include one or more workpiece positions that are below the first and second targets.

39. A method according to claim 38 wherein the steps of mounting the first and second targets further comprise the steps of

positioning the first and second targets equidistant from and symmetric about a vertical plane of symmetry wherein the front faces of the first and second targets face generally downward and toward each other and toward the one or more workpiece positions that are below the targets.

40. A method according to claim 35 wherein:

the magnetization angles of the first and second sets of outer magnetic poles is between thirty and sixty degrees, inclusive, relative to the front surfaces of the first and second targets respectively; and

each one of the inner magnetic poles of the first and second sets of inner magnetic poles is magnetized in a direction perpendicular to the front surface of the first and second targets respectively.

41. A method according to claim 35 wherein:

the magnetization angles of each of the outer magnetic poles of the first and second sets of magnetic poles causes magnetic flux from the first and second sets of magnetic poles respectively to be directed radially outward and away from the inner magnetic poles of the first and second sets of inner magnetic poles.

42. A method according to claim 41 wherein:

the magnetic flux from the first and second sets of outer magnetic poles is directed beyond the perimeter of the first and second targets respectively.

35. A method of sputter depositing material from a sputtering target onto a substrate, comprising the steps of:

mounting within a vacuum chamber a first sputtering target having a perimeter, a front surface and a first rear surface opposite the front surface;

mounting a first set of one or more inner magnetic poles, each having the same polarity, adjacent the rear surface;

mounting a first set of one or more outer magnetic poles, each having a polarity opposite the polarity of the inner magnetic poles, adjacent the rear surface adjacent to the perimeter of the first target, wherein

the first set of outer magnetic poles collectively encircles the first set of inner magnetic poles; and

each one of the outer magnetic poles is magnetized at an acute magnetization angle relative to the front surface; and

sputtering material from the first target onto the substrate.

43. An apparatus for sputter deposition of material from a sputtering target onto a substrate, comprising:

a first sputtering target having a first perimeter, a front surface facing generally downward and a rear surface opposite the front surface and facing generally upward;

a first set of one or more inner magnetic poles, each having the same polarity, mounted adjacent the rear surface;

a first set of one or more outer magnetic poles, each having a polarity opposite the polarity of the inner magnetic poles, mounted adjacent the rear surface and the first perimeter, wherein

the first set of outer magnetic poles collectively encircles the first set of inner magnetic poles; and

each one of the outer magnetic poles is physically oriented at an orientation angle between thirty and sixty degrees relative to the first front surface, the orientation angle being directed radially outward and away from the first set of inner magnetic poles.

44. Apparatus according to claim 43 and further comprising

a second sputtering target having a second perimeter, a second front surface and a second rear surface opposite the second front surface;

a second set of one or more inner magnetic poles, each having the same polarity, mounted adjacent the second rear surface;

a second set of one or more outer magnetic poles, each having a polarity opposite the polarity of the inner magnetic poles, mounted adjacent the second rear surface juxtaposed to the second perimeter, wherein

the second set of outer magnetic poles collectively encircles the second set of inner magnetic poles; and

each one of the outer magnetic poles of the second set of outer magnetic poles is oriented at an orientation angle between thirty a nd sixty degrees relative to the second front surface, the orientation angle being directed radially outward and away from the second set of inner magnetic poles.

46. A method according to claim 45 and further comprising the steps of:

mounting a second sputtering target within the vacuum chamber, the second target having second perimeter, second front surface and a second rear surface opposite the second front surface;

mounting a second set of one or more inner magnetic poles, each having the same polarity, adjacent the second rear surface;

mounting a second set of one or more outer magnetic poles, each having a polarity opposite the polarity of the inner magnetic poles, adjacent the second rear surface and the perimeter of the second target, wherein

the second set of outer magnetic poles collectively encircles the second set of inner magnetic poles; and

each one of the outer magnetic poles of the second set is physically oriented at an orientation angle between thirty and sixty degrees relative to the second front surface, the orientation angle being directed radially outward and away from the second set of inner magnetic poles; and

sputtering material from the second target onto the substrate.

45. A method of sputter depositing material from a sputtering target onto a substrate, comprising the steps of

mounting within a vacuum chamber a first sputtering target having a first perimeter, a front surface facing generally downward and a rear surface opposite the front surface and facing generally upward;

mounting a first set of one or more inner magnetic poles, each having the same polarity, adjacent the rear surface;

mounting a first set of one or more outer magnetic poles, each having a polarity opposite the polarity of the inner magnetic poles, adjacent the rear surface and the first perimeter, wherein

the first set of outer magnetic poles collectively encircles the first set of inner magnetic poles; and

each one of the outer magnetic poles is physically oriented at an orientation angle between thirty and sixty degrees relative to the first front surface, the orientation angle being directed radially outward and away from the first set of inner magnetic poles; and

sputtering material from the first target onto the substrate.