Contact-less probe of semiconductor wafers

• US 20020047722A1
• Filed: 04/11/2001
• Published: 04/25/2002
• Est. Priority Date: 10/20/1998
• Status: Active Grant

• Current Assignee: Donald J. Cook, Edward J. Nowak, Minh H. Tong
• Original Assignee: Donald J. Cook, Edward J. Nowak, Minh H. Tong
• Inventors: Cook, Donald J., Nowak, Edward J., Tong, Minh H.
• Granted Patent: US 6,455,766 B1
• Time in Patent Office: Days
• US Class Current: 324/765
• CPC Class Codes: G01R 31/311 of integrated circuits G01R31/31728 takes precedence
• CPC Class Codes: Y10S 136/291 Applications
• CPC Class Codes: Y10S 136/293 Circuits

Abstract

A device, having circuits formed thereon, comprises a circuit including a frequency generator for generating a detectable radio frequency energy when powered and a power generator, coupled to the frequency generator, for generating power when exposed to light.

Claims

1. A device comprising:

a test circuit including a frequency generator for generating a detectable radio frequency energy when powered; and

a power generator, coupled to said frequency generator, for generating power when exposed to light.

2. The device of claim 1, wherein said radio frequency energy comprises detectable characteristics correlating to a level of processing quality of said device.

3. The device as in claim 1, wherein said frequency generator comprises a ring oscillator.

4. The device as in claim 1, wherein said power generator comprises a plurality of diodes.

5. The device as in claim 4, wherein said plurality of diodes are each formed in a separate well and coupled in series for generating voltage when exposed to light.

6. The device as in claim 1, wherein said power generator includes an antenna.

7. The device as in claim 6, wherein said antenna comprises signal wiring connected to said power generator.

8. The device as in claim 1, further comprising a current amplifying device connected to said power generator.

9. The device as in claim 8, wherein said current amplifying device comprises:

a capacitor connected to said power generator and for being charged by said power generator;

a transistor for controlling said capacitor;

a second series of diodes for activating said transistor when exposed to light.

10. A power generating circuit comprising:

a substrate;

a plurality of diodes each formed in a separate well in said substrate and coupled in series for generating voltage when exposed to light; and

an opaque layer overlapping at least a border formed by said well and said substrate for preventing activating a parasitic diode when exposed to said light.

11. The power generating circuit as in claim 10, further comprising a current amplifying device connected to said power generator.

12. The power generating circuit as in claim 11, wherein said current amplifying device comprises:

a capacitor connected to said power generator and for being charged by said power generator;

a transistor for controlling said capacitor;

a second series of diodes for activating said transistor when exposed to light.

14. The system of claim 13, wherein said radio frequency energy comprises detectable characteristics correlating to a level of processing quality of said device.

15. The system as in claim 13, wherein said frequency generator comprises a ring oscillator.

16. The system as in claim 13, wherein said power generator comprises a plurality of diodes.

17. The system as in claim 16, wherein said plurality of diodes are each formed in a separate well and coupled in series for generating voltage when exposed to light.

18. The system as in claim 13, wherein said power generator includes an antenna.

19. The system as in claim 18, wherein said antenna comprises signal wiring connected to said power generator.

20. The system as in claim 13, wherein said optical device comprises a microscope light.

21. The system as in claim 13, wherein said receiver comprises a radio frequency receiver.

22. The system as in claim 13, further comprising a current amplifying device connected to said power generator.

23. The device as in claim 22, wherein said current amplifying device comprises:

a capacitor connected to said power generator and for being charged by said power generator;

a transistor for controlling said capacitor;

a second series of diodes for activating said transistor when exposed to light.

13. A system for testing semiconductor chips comprising:

a circuit including a frequency generator for generating a detectable radio frequency energy when powered;

a power generator, coupled to said frequency generator, for generating power when exposed to light;

an optical device for generating said light;

a receiver for detecting said radio frequency energy;

an analyzer connected to said receiver for analyzing said radio frequency energy.