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One-piece cleaning tank with indium bonded megasonic transducer

  • US 20020050768A1
  • Filed: 04/23/2001
  • Published: 05/02/2002
  • Est. Priority Date: 08/27/1999
  • Status: Active Grant
First Claim
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1. A megasonic cleaning system comprising:

  • a tank for holding a volume of cleaning solution, the tank comprising a plurality of sides and a bottom;

    at least one piezoelectric crystal for generating acoustic energy in the frequency range of 0.4 to 2.0 MHz when power is applied to the piezoelectric crystal; and

    a bonding layer comprised of indium positioned between the piezoelectric crystal and the bottom or one of the sides for attaching the piezoelectric crystal to the tank.

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