Cold cathode field emission device, process for the production thereof, and cold cathode field emission display
First Claim
1. A cold cathode field emission device comprising;
- (A) a cathode electrode formed on a support, (B) an insulating layer formed on the support and the cathode electrode, (C) a gate electrode formed on the insulating layer, (D) an opening portion which penetrates through the gate electrode and the insulating layer, and (E) an electron emitting portion which is positioned at a bottom portion of the opening portion and has a tip portion having a conical form and being composed of a crystalline conductive material, the tip portion of the electron emitting portion having a crystal boundary nearly perpendicular to the cathode electrode.
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Accused Products
Abstract
A cold cathode field emission device comprising; (A) a cathode electrode formed on a support, (B) an insulating layer formed on the support and the cathode electrode, (C) a gate electrode formed on the insulating layer, (D) an opening portion which penetrates through the gate electrode and the insulating layer, and (E) an electron emitting portion which is positioned at a bottom portion of the opening portion and has a tip portion having a conical form and being composed of a crystalline conductive material, the tip portion of the electron emitting portion having a crystal boundary nearly perpendicular to the cathode electrode.
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Citations
49 Claims
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1. A cold cathode field emission device comprising;
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(A) a cathode electrode formed on a support, (B) an insulating layer formed on the support and the cathode electrode, (C) a gate electrode formed on the insulating layer, (D) an opening portion which penetrates through the gate electrode and the insulating layer, and (E) an electron emitting portion which is positioned at a bottom portion of the opening portion and has a tip portion having a conical form and being composed of a crystalline conductive material, the tip portion of the electron emitting portion having a crystal boundary nearly perpendicular to the cathode electrode. - View Dependent Claims (2, 3, 4, 5, 6)
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7. A cold cathode field emission device comprising;
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(A) a cathode electrode formed on a support, (B) an insulating layer formed on the support and the cathode electrode, (C) a gate electrode formed on the insulating layer, (D) an opening portion which penetrates through the gate electrode and the insulating layer, and (E) an electron emitting portion which is positioned at a bottom portion of the opening portion and has a tip portion having a conical form, wherein a relationship of θ
w<
θ
e<
90°
is satisfied where θ
w is an inclination angle of a wall surface of the opening portion measured from the surface of the cathode electrode as a reference and θ
e is an inclination angle of slant of the tip portion measured from the surface of the cathode electrode as a reference.
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8. A cold cathode field emission device comprising;
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(A) a cathode electrode formed on a support, (B) an insulating layer formed on the support and the cathode electrode, (C) a gate electrode formed on the insulating layer, (D) an opening portion which penetrates through the gate electrode and the insulating layer, and (E) an electron emitting portion which is positioned at a bottom portion of the opening portion, the electron emitting portion comprising a base portion and a conical sharpened portion formed on the base portion. - View Dependent Claims (9, 10, 11, 12, 13, 14, 15, 16, 17, 19, 20, 21, 22, 23, 24, 25, 26, 27, 28, 30, 31, 32, 33, 34, 35, 36, 37, 38, 39, 40, 41, 42, 43, 44, 45, 46)
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18. A process for the production of a cold cathode field emission device comprising the steps of;
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(a) forming a cathode electrode on a support, (b) forming an insulating layer on the support and the cathode electrode, (c) forming a gate electrode on the insulating layer, (d) forming an opening portion which penetrates through at least the insulating layer and has a bottom portion where the cathode electrode is exposed, (e) forming a conductive material layer for forming an electron emitting portion on the entire surface including the inside of the opening portion, (f) forming a mask material layer on the conductive material layer so as to mask a region of the conductive material layer positioned in the central portion of the opening portion, and (g) etching the conductive material layer and the mask material layer under an anisotropic etching condition where an etch rate of the conductive material layer in the direction perpendicular to the support is larger than an etch rate of the mask material layer in the direction perpendicular to the support, to form, in the opening portion, the electron emitting portion which is composed of the conductive material layer and has a tip portion having a conical form.
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29. A process for the production of a cold cathode field emission device having an electron emitting portion which comprises a base portion and a conical sharpened portion formed on the base portion, and the process comprising the steps of;
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(a) forming a cathode electrode on a support, (b) forming an insulating layer on the support and the cathode electrode, (c) forming a gate electrode on the insulating layer, (d) forming an opening portion which penetrates through at least the insulating layer and has a bottom portion where the cathode electrode is exposed, (e) filling the bottom portion of the opening portion with a base portion composed of a first conductive material layer, (f) forming a second conductive material layer on the entire surface including a residual portion of the opening portion, (g) forming a mask material layer on the second conductive material layer so as to mask a region of the second conductive material layer positioned in the central portion of the opening portion, and (h) etching the second conductive material layer and the mask material layer under an anisotropic etching condition where an etch rate of the second conductive material layer in the direction perpendicular to the support is higher than an etch rate of the mask material layer in the direction perpendicular to the support, to form the sharpened portion composed of the second conductive material layer on the base portion.
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47. A cold cathode field emission display comprising a plurality of pixels,
each pixel being constituted of a plurality of cold cathode field emission devices and of an anode electrode and a fluorescence layer formed on a substrate so as to face a plurality of the cold cathode field emission devices, each cold cathode field emission device comprising; -
(A) a cathode electrode formed on a support, (B) an insulating layer formed on the support and the cathode electrode, (C) a gate electrode formed on the insulating layer, (D) an opening portion which penetrates through the gate electrode and the insulating layer, and (E) an electron emitting portion which is positioned at a bottom portion of the opening portion and has a tip portion having a conical form and being composed of a crystalline conductive material, the tip portion of the electron emitting portion having a crystal boundary nearly perpendicular to the cathode electrode.
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48. A cold cathode field emission display comprising a plurality of pixels,
each pixel being constituted of a plurality of cold cathode field emission devices and of an anode electrode and a fluorescence layer formed on a substrate so as to face a plurality of the cold cathode field emission devices, each cold cathode field emission device comprising; -
(A) a cathode electrode formed on a support, (B) an insulating layer formed on the support and the cathode electrode, (C) a gate electrode formed on the insulating layer, (D) an opening portion which penetrates through the gate electrode and the insulating layer, and (E) an electron emitting portion which is positioned at a bottom portion of the opening portion and has a tip portion having a conical form, wherein a relationship of θ
w<
θ
e<
90°
is satisfied where θ
w is an inclination angle of a wall surface of the opening portion measured from the surface of the cathode electrode as a reference and θ
e is an inclination angle of slant of the tip portion measured from the surface of the cathode electrode as a reference.
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49. A cold cathode field emission display comprising a plurality of pixels,
each pixel being constituted of a plurality of cold cathode field emission devices and of an anode electrode and a fluorescence layer formed on a substrate so as to face a plurality of the cold cathode field emission devices, each cold cathode field emission device comprising; -
(A) a cathode electrode formed on a support, (B) an insulating layer formed on the support and the cathode electrode, (C) a gate electrode formed on the insulating layer, (D) an opening portion which penetrates through the gate electrode and the insulating layer, and (E) an electron emitting portion which is positioned at a bottom portion of the opening portion, the electron emitting portion comprising a base portion and a conical sharpened portion formed on the base portion.
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Specification