Please download the dossier by clicking on the dossier button x
×

Lithographic projection apparatus, device manufacturing method and device manufactured thereby

  • US 20020051124A1
  • Filed: 09/04/2001
  • Published: 05/02/2002
  • Est. Priority Date: 09/04/2000
  • Status: Active Grant
First Claim
Patent Images

1. A lithographic projection apparatus comprising:

  • a radiation system to supply a projection beam of radiation;

    a support structure adapted to support patterning structure which can be used to pattern the projection beam according to a desired pattern;

    a substrate table to hold a substrate;

    a projection system to project the patterned beam onto a target portion of the substrate;

    a gas supply, configured and arranged to supply a gaseous hydrocarbon to a space containing a mirror;

    a least one sensor selected from the group comprising a reflectivity sensor to monitor a reflectivity of said mirror and a pressure sensor to monitor a background pressure in said space; and

    a gas supply control, responsive to a signal from said at least one sensor to control said gas supply.

View all claims
  • 3 Assignments
Timeline View
Assignment View
    ×
    ×