Galvano-mirror and method of making the same
First Claim
1. A method of making a galvano-mirror provided with a mirror plate and at least one driver plate, the mirror plate including a pivotable member upon which reflecting means and a first electrode are provided, the driver plate including a second electrode facing the first electrode, the method comprising the steps of:
- preparing a first material substrate formed with a plurality of mirror plate regions each of which corresponds in arrangement to the mirror plate;
preparing a second material substrate formed with a plurality of driver plate regions each of which corresponds in arrangement to the driver plate;
attaching the first and the second material substrates so that each of the mirror plate regions faces a relevant one of the driver plate regions; and
dividing the attached first and second material substrates into individual galvano-mirrors.
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Accused Products
Abstract
A method of making a galvano-mirror is provided. It includes the following steps. First, a first material substrate formed with a plurality of mirror plate regions is prepared. The mirror plate regions correspond in arrangement to the mirror plate of the galvano-mirror. Then, a second material substrate formed with a plurality of driver plate regions is prepared. The driver plate regions correspond in arrangement to the driver plate of the galvano-mirror. Then, the first and the second material substrates are attached to each other so that each of the mirror plate regions faces a relevant one of the driver plate regions. Finally, the attached first and second material substrates are divided into individual gaslvano-mirrors.
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Citations
16 Claims
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1. A method of making a galvano-mirror provided with a mirror plate and at least one driver plate, the mirror plate including a pivotable member upon which reflecting means and a first electrode are provided, the driver plate including a second electrode facing the first electrode, the method comprising the steps of:
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preparing a first material substrate formed with a plurality of mirror plate regions each of which corresponds in arrangement to the mirror plate;
preparing a second material substrate formed with a plurality of driver plate regions each of which corresponds in arrangement to the driver plate;
attaching the first and the second material substrates so that each of the mirror plate regions faces a relevant one of the driver plate regions; and
dividing the attached first and second material substrates into individual galvano-mirrors. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12, 13, 14)
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15. A galvano-mirror comprising:
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a mirror plate provided with a pivotable member upon which reflecting means and a first electrode are provided; and
at least one driver plate provided with a second electrode facing the first electrode;
wherein the mirror plate and the driver plate differ in length from each other.
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16. A galvano-mirror comprising:
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a mirror plate provided with a pivotable member upon which reflecting means and a first electrode are provided; and
a driver plate having an inner surface facing the mirror plate and an outer surface opposite to the inner surface, the inner surface being provided with a second electrode facing the first electrode, the outer surface being provided with a plurality of external connection terminals;
wherein the driver plate is formed with a plurality of through-holes for connecting each of the first and the second electrodes to a relevant one of the external connection terminals.
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Specification