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Stiction-free microstructure releasing method for fabricating MEMS device

  • US 20020058422A1
  • Filed: 12/29/2000
  • Published: 05/16/2002
  • Est. Priority Date: 11/13/2000
  • Status: Active Grant
First Claim
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1. A method for releasing a microstructure for fabricating a device of a micro electro mechanical system (MEMS), comprising the steps of;

  • supplying alcohol vapor bubbled with anhydrous HF;

    maintaining a temperature of the supplying device and a moving path of the anhydrous HF and the alcohol to be higher than a boiling point of the alcohol;

    performing a vapor etching by controlling a temperature and a pressure to be within the vapor region of a phase equilibrium diagram of water; and

    removing silicon oxide of a sacrificial layer on a lower portion of the microstructure.

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