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Sensing head positioning system using two-stage offset air bearings

  • US 20020059014A1
  • Filed: 05/15/2001
  • Published: 05/16/2002
  • Est. Priority Date: 05/16/2000
  • Status: Active Grant
First Claim
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1. An apparatus for positioning a sensing head relative to a workpiece, the apparatus comprising:

  • a control unit operative to provide a plurality of control signals to iteratively control positioning of the sensing head relative to the workpiece;

    a plurality of air injectors disposed and fixedly connected on the periphery of the sensing head, the air injectors receiving the control signals and ejecting a gas between the sensing head and the workpiece to create an air bearing and affect positioning of the sensing head relative to the workpiece in response to the control signals; and

    a plurality of sensors providing a plurality of feedback signals to the control unit, the feedback signals containing information relating to positioning of the optical imaging sensing head relative to the workpiece.

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