Position measuring device, position measurement method, exposure apparatus, exposure method, and superposition measuring device and superposition measurement method
First Claim
1. A position measuring device comprising a calculation unit which calculates mark position information relating to a position of a mark by using a mark signal obtained by irradiating a detection beam onto the mark formed on an object, wherein the calculation unit includes a processing unit which performs predetermined processing on predetermined information to be used when calculating the mark position information, and generates a plurality of processing information, and the device further comprises a correction unit which is electrically connected to the calculation unit and corrects calculation results from the calculation unit based on a plurality of the mark position information calculated by the calculation unit using the plurality of processing information.
1 Assignment
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Accused Products
Abstract
This position measuring device comprising a calculation unit 19 calculates mark position information relating to the position of the mark by using a mark signal obtained by irradiating a detection beam onto the mark formed on an object W, and a correction device 19 for correcting the calculation results from the calculation unit 19 based on the asymmetry of the mark signal.
As a result, positional deviation resulting from asymmetry can be detected, and by correcting for this deviation the effect that the image asymmetry has on the measurement can be reduced. Therefore, a more accurate high precision alignment can be performed, and there is no requirement to increase the NA of the detection optical system, nor to prepare a special short wavelength light source, meaning increases in the size and cost of the apparatus can also be prevented.
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Citations
100 Claims
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1. A position measuring device comprising a calculation unit which calculates mark position information relating to a position of a mark by using a mark signal obtained by irradiating a detection beam onto the mark formed on an object,
wherein the calculation unit includes a processing unit which performs predetermined processing on predetermined information to be used when calculating the mark position information, and generates a plurality of processing information, and the device further comprises a correction unit which is electrically connected to the calculation unit and corrects calculation results from the calculation unit based on a plurality of the mark position information calculated by the calculation unit using the plurality of processing information.
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9. A position measuring device comprising a calculation unit which calculates mark position information relating to a position of a mark by using a mark signal obtained by irradiating a detection beam onto the mark formed on an object,
wherein the mark signal includes phases of diffracted light of different orders generated from the mark, and the device further comprises a correction unit which is electrically connected to the calculation unit and corrects calculation results from the calculation unit based on a plurality of the mark position information calculated from a plurality of the phases.
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15. A position measuring device comprising a calculation unit which calculates mark position information relating to a position of a mark formed on an object, by performing template matching between a template having a predetermined frequency configuration and a mark signal obtained by irradiating a detection beam onto the mark, wherein the device further comprises:
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a filtering unit which performs either one of a first filtering process which reduces a proportion within the mark signal of a frequency component less than a specified frequency and reduces a proportion within the template of a frequency component less than the specified frequency, and a second filtering process which reduces a proportion of a frequency component less than the specified frequency on a correlation function calculated from the template and the mark signal, and the calculation unit is electrically connected to the filtering unit and calculates the mark position information by either one of performing template matching on the mark signal and the template which have been subjected to the first filtering process, and basing the calculations on the correlation function which has been subjected to the second filtering process.
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16. A position measuring device comprising a calculation unit which calculates mark position information relating to a position of a mark formed on an object, by performing folded autocorrelation of a mark signal obtained by irradiating a detection beam onto the mark, wherein the device further comprises:
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a filtering unit which performs filtering processing that reduces a proportion within the mark signal of a frequency component less than a specified frequency, and the calculation unit is electrically connected to the filtering unit and calculates the mark position information by performing a folded autocorrelation of the mark signal which has undergone the filtering processing.
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19. A position measuring device comprising a calculation unit which calculates mark position information relating to a position of a mark by using a mark signal obtained by irradiating a detection beam onto the mark formed on an object, wherein the device further comprises:
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a filtering unit which performs filtering processing of the mark signal, and generating a plurality of mark signals having different frequency configurations, and an extraction unit which is electrically connected to the filtering unit and extracts, from a plurality of mark position information calculated by the calculation unit using the plurality of mark signals, mark position information satisfying a predetermined condition, and a final mark position information is determined based on the extracted mark position information.
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21. A position measuring device comprising a calculation unit which calculates mark position information relating to a position of a mark by using a mark signal obtained by irradiating a detection beam onto the mark formed on an object, wherein the device further comprises:
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a judgment unit which is electrically connected to the calculation unit, compares mark position information calculated by the calculation unit based on the mark signal and a predetermined design value information relating to the mark, and judges acceptability of the calculated mark position information, and a filtering unit which performs filtering processing of the mark signal, and generates a mark processed signal having a different frequency configuration from the signal subjected to the filtering processing, and in a case where acceptability of the mark signal is denied by the judgment unit, the mark position information is calculated by the calculation unit using the generated mark processed signal, and acceptability of the mark position information is judged by the judgment unit, and the filtering processing, the calculation processing of mark position information based on the mark processed signal, and the judgment processing is repeated until acceptability of mark position information calculated by the calculation unit is approved by the judgment unit. - View Dependent Claims (62, 68, 75)
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22. A position measuring device comprising a calculation unit which calculates mark position information relating to a position of a mark by using a mark signal obtained by irradiating a detection beam onto the mark formed on an object, wherein the device further comprises:
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a filtering unit which performs filtering processing on the mark signal, and generates a mark signal having a different frequency configuration, and an evaluation unit which compares a plurality of mark position information calculated by the calculation unit using a plurality of the mark signals having different frequency configurations, and evaluates the mark position information, and the calculation unit is electrically connected to the evaluation unit and calculates a final mark position information based on the plurality of mark position information and evaluation results from the evaluation unit. - View Dependent Claims (23, 24, 27, 28, 29, 63, 69, 70, 76, 77, 79, 80, 81)
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26. A position measuring device comprising a calculation unit which calculates mark position information relating to a position of a mark by using a mark signal obtained by irradiating a detection beam onto the mark formed on an object,
wherein the calculation unit comprises: -
an acquisition unit which acquires a plurality of mark signals having different frequency configurations, and a determination unit which is electrically connected to the acquisition unit and calculates the mark position information for each of the plurality of mark signals acquired by the acquisition unit, and determines a single mark position information based on the calculated plurality of mark position information.
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32. A position measuring method comprising a calculation step which calculates mark position information relating to a position of a mark by using a mark signal obtained by irradiating a detection beam onto the mark formed on an object,
wherein the calculation step performs predetermined processing on predetermined information to be used when calculating the mark position information, and generates a plurality of processing information, and the method further includes correcting calculation results from the calculation step based on a plurality of the mark position information calculated by the calculation step using the plurality of processing information.
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36. A position measuring method comprising a calculation step which calculates mark position information relating to a position of a mark by using a mark signal obtained by irradiating a detection beam onto the mark formed on an object,
wherein the mark signal includes phases of diffracted light of different orders generated from the mark, and calculation results from the calculation step are corrected based on a plurality of mark position information calculated from the plurality of phases.
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41. A position measuring method using a calculation unit which calculates mark position information relating to a position of a mark formed on an object, by performing template matching between a template having a predetermined frequency configuration and a mark signal obtained by irradiating a detection beam onto the mark, the method comprising:
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carrying out either one of a first filtering process which reduces a proportion within the mark signal of a frequency component less than a specified frequency and reducing a proportion within the template of a frequency component less than the specified frequency, and a second filtering process which reduces a proportion of a frequency component less than the specified frequency on a correlation function calculated from the template and the mark signal, and the calculation unit calculates the mark position information by either one of performing template matching on the mark signal and the template which have been subjected to the first filtering process, and basing the calculations on the correlation function which has been subjected to the second filtering process. - View Dependent Claims (43, 44, 46, 49, 50, 51, 84, 85, 87, 89, 90, 91, 94, 96, 97, 98)
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42. A position measuring method using a calculation unit which calculates mark position information relating to a position of a mark formed on an object, by performing folded autocorrelation of a mark signal obtained by irradiating a detection beam onto the mark, the method comprising:
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performing filtering processing which reduces a proportion within the mark signal of a frequency component less than a specified frequency, and the calculation unit calculates the mark position information by performing a folded autocorrelation of the mark signal which has undergone the filtering processing. - View Dependent Claims (82, 83, 88, 95)
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45. A position measuring method using a calculation unit which calculates mark position information relating to a position of a mark by using a mark signal obtained by irradiating a detection beam onto the mark formed on an object, the method comprising:
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performing filtering processing of the mark signal, and generating a plurality of mark signals having different frequency configurations, and extracting, from a plurality of mark position information calculated by the calculation unit using the plurality of mark signals, mark position information satisfying a predetermined condition, and determining a final mark position information based on the extracted mark position information.
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47. A position measuring method using a calculation unit which calculates mark position information relating to a position of a mark by using a mark signal obtained by irradiating a detection beam onto the mark formed on an object, the method comprising:
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comparing mark position information calculated by the calculation unit based on the mark signal and a predetermined design value information relating to the mark, and then judging acceptability of the calculated mark position information, performing filtering processing of the mark signal, and generating a mark processed signal having a different frequency configuration from the signal subjected to the filtering processing, and in a case where acceptability of the mark signal is denied by the judgment, calculating the mark position information by the calculation unit using the generated mark processed signal, and judging acceptability of the mark position information, and repeating the filtering processing, the calculation processing of mark position information based on the mark processed signal, and the judgment processing until acceptability of mark position information calculated by the calculation unit is approved.
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48. A position measuring method using a calculation unit which calculates mark position information relating to a position of a mark by using a mark signal obtained by irradiating a detection beam onto the mark formed on an object, the method comprising:
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performing filtering processing on the mark signal, and generating a mark signal having a different frequency configuration, comparing a plurality of mark position information calculated by the calculation unit using a plurality of the mark signals having different frequency configurations, and evaluating the mark position information, and the calculation unit calculates a final mark position information based on the plurality of mark position information and the evaluation results.
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52. A position measuring method which calculates mark position information relating to a position of the mark by using a mark signal obtained by irradiating a detection beam onto the mark formed on an object, comprising:
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acquiring a plurality of mark signals having different frequency configurations, calculating the mark position information for each of the plurality of mark signals acquired, and determining a single mark position information based on the calculated plurality of mark position information. - View Dependent Claims (53, 54, 92, 99)
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Specification