Miniature broadband acoustic transducer
First Claim
1. An acoustic transducer comprising:
- a cover member having a planar surface with a plurality of perforations therein;
a substrate operably attached to said perforated member;
a diaphragm positioned between said cover member and said substrate, said diaphragm laterally movable within a plane parallel to said planar surface of said cover member;
a circuit operably coupled to said diaphragm to apply an electrical field in the space between said perforated member and diaphragm;
a circuit operably coupled to said diaphragm and responsive to changes in electrical capacitance between said cover member and said diaphragm; and
wherein the cover member includes a perimeter of attachment between said cover member and said substrate that is shaped to reduce the sensitivity of said cover member to intrinsic internal bending moments.
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Accused Products
Abstract
An acoustic transducer is disclosed including: a fixed perforated member; a freely movable diaphragm spaced from the perforated member; a support ring in the perforated member maintaining the proper spacing between the diaphragm and the perforated member near the perimeter; means of suspension allowing the diaphragm to rest freely on the support ring and yet mechanically decouples the diaphragm from the perforated member; means of applying an electrical field in the space between the perforated member and the diaphragm; means of detecting the change of electrical capacitance between the perforated member and the diaphragm when the diaphragm moves in response to an incident acoustic sound pressure wave.
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Citations
42 Claims
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1. An acoustic transducer comprising:
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a cover member having a planar surface with a plurality of perforations therein;
a substrate operably attached to said perforated member;
a diaphragm positioned between said cover member and said substrate, said diaphragm laterally movable within a plane parallel to said planar surface of said cover member;
a circuit operably coupled to said diaphragm to apply an electrical field in the space between said perforated member and diaphragm;
a circuit operably coupled to said diaphragm and responsive to changes in electrical capacitance between said cover member and said diaphragm; and
wherein the cover member includes a perimeter of attachment between said cover member and said substrate that is shaped to reduce the sensitivity of said cover member to intrinsic internal bending moments. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12, 14, 15, 16, 17, 18, 19, 20, 21, 22, 23, 24, 26, 27, 28, 29, 30, 31, 32, 33, 34, 36, 37, 38, 40, 41, 42)
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13. An acoustic transducer comprising:
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a cover member having a planar surface with a plurality of perforations therein;
a substrate operably attached to said perforated member;
a diaphragm positioned between said cover member and said substrate, said diaphragm laterally movable within a plane parallel to said planar surface of said cover member;
a circuit operably coupled to said diaphragm to apply an electrical field in the space between said perforated member and diaphragm;
a circuit operably coupled to said diaphragm and responsive to changes in electrical capacitance between said cover member and said diaphragm; and
wherein said cover member includes a support structure having one or more openings made therein to provide a low frequency pressure equalization path across said diaphragm.
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25. An acoustic transducer comprising:
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a cover member having a planar surface with a plurality of perforations therein;
a substrate operably attached to the perforated member;
a diaphragm positioned between the cover member and the substrate, the diaphragm laterally movable within a plane parallel to the planar surface of the cover member, wherein the cover member includes a perimeter of attachment between the cover member and the substrate that is shaped to reduce the sensitivity of the cover member to intrinsic internal bending moments.
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35. An acoustic transducer comprising:
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a substrate;
a cover member having a planar surface and a support structure;
a diaphragm positioned between the cover member and the substrate, the diaphragm laterally movable within a plane parallel to the planar surface of the cover member, wherein the support ring engages the periphery of the diaphragm when the transducer is biased, to maintain the spacing of the diaphragm from the cover member.
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39. An acoustic transducer comprising:
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a substrate;
a cover member having a planar surface and a support structure;
a diaphragm;
means for suspending the diaphragm from the substrate to permit free movement of the diaphragm within its plane, wherein the support structure engages the periphery of the diaphragm when the transducer is biased, to maintain the spacing of the diaphragm from the cover member.
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Specification