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Sterilization system employing a switching module adapted to pulsate the low frequency power applied to a plasma

  • US 20020068012A1
  • Filed: 03/19/2001
  • Published: 06/06/2002
  • Est. Priority Date: 10/02/2000
  • Status: Active Grant
First Claim
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1. A sterilization system that applies low frequency power to a plasma within a vacuum chamber to remove gas or vapor species from an article, the low frequency power having a frequency less than or equal to approximately 200 kHz, the sterilization system comprising:

  • a switching module adapted to pulsate the low frequency power applied to the plasma;

    a low frequency power feedback control system for controllably adjusting the low frequency power applied to the plasma, the low frequency power feedback control system comprising;

    a power monitor adapted to produce a first signal indicative of the low frequency power applied to the plasma within the vacuum chamber;

    a power control module adapted to produce a second signal in response to the first signal from the power monitor; and

    a power controller adapted to adjust, in response to the second signal, the low frequency power applied to the plasma to maintain a substantially stable average low frequency power applied to the plasma while the article is being processed.

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