×

Gas cluster ion beam size diagnostics and workpiece processing

  • US 20020070361A1
  • Filed: 07/13/2001
  • Published: 06/13/2002
  • Est. Priority Date: 07/14/2000
  • Status: Active Grant
First Claim
Patent Images

1. An apparatus for gas cluster ion beam (GCIB) mass or cluster size diagnostics for improving GCIB workpiece processing, comprising:

  • a vacuum vessel;

    a gas cluster ion beam source within the vacuum vessel for producing a gas cluster ion beam;

    an accelerator for accelerating the gas cluster ion beam along a trajectory;

    a beam gate for controllably interrupting and restoring the gas cluster ion beam;

    beam current measurement means disposed along the trajectory at a predetermined distance, L, from said beam gate;

    workpiece holding means disposed along the trajectory for holding a workpiece for gas cluster ion beam processing;

    control means for providing beam gating signals to said beam gate that controllably interrupt and restore the gas cluster ion beam;

    time-of-flight measurement means for measuring the times-of-flight of components of the gas cluster ion beam over said distance, L; and

    a time-of-flight analyzer to analyze said times of flight of components of the gas cluster ion beam in order to provide output information relative to GCIB mass or cluster size;

    wherein said output information is used in the gas cluster ion beam processing of the workpiece.

View all claims
  • 5 Assignments
Timeline View
Assignment View
    ×
    ×