High voltage vertical conduction superjunction semiconductor device
First Claim
1. A high voltage vertical conduction superjunction semiconductor device comprising:
- a body of one conductivity type;
a plurality of spaced vertical trenches formed into the upper surface of said body;
a diffusion of the other conductivity type formed into the interior surface of said plurality of said trenches;
a MOSgated structure connected to the top of said body and to the top of each of said diffusions;
the thickness and concentration of said diffusion and the width and concentration of said body being matched to insure substantially full depletion of said diffusion and body when blocking voltage is applied to said body.
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Accused Products
Abstract
A high voltage vertical conduction semiconductor device has a plurality of deep trenches or holes in a lightly doped body of one conductivity type. A diffusion of the other conductivity type is formed in the trench walls to a depth and a concentration which matches that of the body so that, under reverse blocking, both regions fully deplete. The elongated trench or hole is filled with a dielectric which may be a composite of nitride and oxide layers having a lateral dimension change matched to that of the silicon. The filler may also be a highly resistive SIPOS which permits leakage current flow from source to drain to ensure a uniform electric field distribution along the length of the trench during blocking.
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Citations
28 Claims
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1. A high voltage vertical conduction superjunction semiconductor device comprising:
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a body of one conductivity type;
a plurality of spaced vertical trenches formed into the upper surface of said body;
a diffusion of the other conductivity type formed into the interior surface of said plurality of said trenches;
a MOSgated structure connected to the top of said body and to the top of each of said diffusions;
the thickness and concentration of said diffusion and the width and concentration of said body being matched to insure substantially full depletion of said diffusion and body when blocking voltage is applied to said body. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12, 13, 14, 15, 16, 17, 18, 19, 20, 21, 22, 23, 24, 26, 27, 28)
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25. In a semiconductor device containing a trench formed in the upper surface of a monocrystaline wafer;
- a dielectric filler for filling the interior of said trench;
wherein said dielectric material consists of alternate vertical layers of first and second dielectrics of diverse thermal expansion characteristics which, together, match the expansion characteristics of silicon.
- a dielectric filler for filling the interior of said trench;
Specification