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One-chip micro-integrated optoelectronic sensor

  • US 20020074553A1
  • Filed: 12/15/2000
  • Published: 06/20/2002
  • Est. Priority Date: 12/15/2000
  • Status: Active Grant
First Claim
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1. An optoelectronic device for providing light emission or detection, comprising:

  • an optically transparent substrate;

    an optically transparent semiconductor layer on the substrate, the semiconductor layer having a top surface;

    an insulating layer on a first area of the top surface of the semiconductor layer, the insulating layer having a selected thickness to provide tunneling from a Schottky barrier;

    a layer of metal on the insulating layer, the metal forming a Schottky barrier and being selected to provide low diffusion rate of the metal through the insulating layer under conditions of deposition of the layer, and an ohmic contact to the layer of metal; and

    an ohmic contact on a second area of the top surface of the semiconductor layer.

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