Methods for processing, optimization, calibration and display of measured dielectrometry signals using property estimation grids
First Claim
1. A method for generating, and evaluating, property estimation grids for use with a dielectrometer for measuring preselected properties of a material comprising the steps of:
- a) defining electrical, physical, and geometric properties for a material including preselected properties of the material;
b) defining operating point parameters and an electrode geometry, electrode configuration, substrate material and dimensions, and electrical source excitation for the dielectrometer;
c) inputting the material properties, the operating point parameters, and the dielectrometer electrode substrate geometry, configuration and source excitation into a model to compute and input/output terminal relation value;
d) recording in a database the terminal relation value as a property estimation grid point;
e) adjusting the preselected properties of the material and repeating steps c) and d).
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Abstract
A method is disclosed for processing, optimization, calibration, and display of measured dielectrometry signals. A property estimator is coupled by way of instrumentation to an electrode structure and translates sensed electromagnetic responses into estimates of one or more preselected properties or dimensions of the material, such as dielectric permittivity and ohmic conductivity, layer thickness, or other physical properties that affect dielectric properties, or presence of other lossy dielectric or metallic objects. A dielectrometry sensor is disclosed which can be connected in various ways to have different effective penetration depths of electric fields but with all configurations having the same air-gap, fluid gap, or shim lift-off height, thereby greatly improving the performance of the property estimators by decreasing the number of unknowns. The sensor geometry consist of a periodic structure with, at any one time, a single sensing element that provides for multiple wavelength within the same sensor footprint.
47 Citations
29 Claims
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1. A method for generating, and evaluating, property estimation grids for use with a dielectrometer for measuring preselected properties of a material comprising the steps of:
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a) defining electrical, physical, and geometric properties for a material including preselected properties of the material;
b) defining operating point parameters and an electrode geometry, electrode configuration, substrate material and dimensions, and electrical source excitation for the dielectrometer;
c) inputting the material properties, the operating point parameters, and the dielectrometer electrode substrate geometry, configuration and source excitation into a model to compute and input/output terminal relation value;
d) recording in a database the terminal relation value as a property estimation grid point;
e) adjusting the preselected properties of the material and repeating steps c) and d). - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12, 13, 14, 15, 16, 17)
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18. A method for selection of a dielectrometer electrode and substrate structures and operating point for measuring one or more preselected properties of an material comprising the steps of:
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a) defining electrical, physical, and geometric properties for a material including preselected properties of the material;
b) defining dielectrometer operating point parameters and an electrode geometry, electrode configuration, substrate material and geometry, and electrical source excitation for the dielectrometer;
c) inputting the material properties, the dielectrometer operating point parameters, and the dielectrometer electrode geometry, configuration, substrate material and source excitation into a model to compute an input/output terminal relation value;
d) adjusting the preselected properties of the material to compute another terminal relation value;
e) computing Jacobian elements which are measures of the variation in said terminal relation values due to the variation in the preselected material properties;
f) computing a singular value decomposition for the Jacobian elements to obtain singular values, singular vectors and condition number of the Jacobian elements;
g) evaluating sensitivity, selectivity, and dynamic range of the dielectrometer electrode structure and operating point using the singular values, singular vectors, and condition numbers for material property estimate requirements;
h) repeating Steps c-g with adjusted dielectrometer operating point parameters and electrode geometry, configuration, substrate material and geometry, and source excitation until the material property estimate requirements are achieved.
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19. A method using a property estimator which accesses a property estimation grid for translating the sensed electromagnetic responses of a dielectrometer into estimates of the preselected properties of the material, the property estimator generating the property estimation grid by successively implementing a model which provides for each implementation prediction of a response for the preselected properties based on a set of properties characterizing the electrode and substrate structures and the material.
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20. A property estimator which accesses a property estimation grid for translating each sensed electromagnetic response into a proximity (or lift-off) estimate, the property estimator generating the property estimation grid by successively implementing a model which provides for each implementation a prediction of a response for a particular proximity based on a set of properties characterizing the dielectrometer electrode and substrate structures and the material under test.
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21. A method for generating property estimates of one or more preselected properties of a material comprising:
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a) providing an electromagnetic structure capable of imposing an electric field in the material when driven by an electrical signal and sensing an electromagnetic response, an analyzer for applying an electric signal to the electromagnetic structure and sensing the response, and a property estimator for translating sensed responses into estimates of one or more preselected properties of the material;
b) defining a dynamic range and property estimate tolerance requirement for the preselected properties of the material;
c) selecting an electrode geometry, configuration, substrate material and geometry, and source excitation for the electromagnetic structure d) generating property estimation grids for the preselected material properties and operating point response curves for operating point properties and analyzing the grids and curves to define a measurement strategy;
e) optimizing operating point properties and electrode geometry, configuration, substrate material and geometry, and source excitation, said optimizing including generating property estimation grids and operating point response curves at each operating point;
f) sensing electromagnetic response at each operating point;
g) converting electromagnetic responses into estimates of the preselected properties; and
estimating property estimate technology as a function of values of the estimated preselected properties over the defined dynamic range using the property estimation grids and operating point response curves.
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22. A sensor comprising:
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a first and a second interdigital conductors; and
a meandering conductor which has elements which parallel the first interdigital conductor. - View Dependent Claims (23, 24, 25, 29)
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26. A method for translating the sensed electromagnetic responses of a dielectrometer into estimates of the preselected properties of the material, comprising the steps of:
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accessing a property estimation grid using a property estimator;
generating a property estimation grid for the preselected properties based on a set of properties with the property estimator; and
incrementing a model which provides for each implementation prediction of a response for the preselected properties based on a set of properties characterizing the electrode and substrate structures and the material.
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27. A property estimator comprising:
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an input device for receiving a sensed electromagnetic response by at least one sensor;
a property estimation grid for translating each sensed electromagnetic response into a proximity estimate; and
a property analyzer for generating an improved property estimation grid by successively implementing a model which provides for each implementation a prediction of a response for a particular proximity based on a set of properties characterizing the dielectrometer electrode and substrate structures and the material under test.
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28. A method of determining properties of material under test comprising the steps of:
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providing a pair of substantially identical sensors;
immersing the material under test in a first liquid dielectric;
pressing one of the sensors against the material under test;
immersing the other sensor in the first liquid dielectric and spaced from the material under test;
measuring the capacitance of each of the two sensors;
adding a second miscible liquid with a higher dielectric permittivity to the first liquid; and
comparing the capacitance of the sensors as the second liquid is added.
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Specification