MEMS mirror and method of fabrication
First Claim
1. A moveable micromirror comprising:
- a supporting structure;
a flexible post extending from the supporting structure; and
a table extending radially from the end of the post along a plane generally perpendicular to the post, the table having a reflective surface facing away from the supporting structure, wherein the post is so constructed so as to be sufficiently flexible to allow the reflective surface to be selectively moveable and positionable, with at least two degrees of freedom, when urged by a suitable actuating force.
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Accused Products
Abstract
A moveable micromirror includes a supporting structure, a flexible post extending from the supporting structure, and a table extending radially from the end of the post along a plane generally perpendicular to the post, the table having a reflective surface facing away from the supporting structure. The post, preferably formed of single-crystal silicon, is dimensioned to be sufficiently flexible to allow the reflective surface to be selectively moveable and positionable, with at least two degrees of freedom, when urged by a suitable actuating force. A method of making an array of moveable micromirrors of this type includes deep etching a silicon substrate so as to form posts surrounded by trenches, etching back the surface of the substrate around the posts so as to allow the posts to protrude beyond the surface of the substrate, and affixing a table with a reflective surface thereon to the tops of a plurality of the posts.
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Citations
23 Claims
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1. A moveable micromirror comprising:
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a supporting structure;
a flexible post extending from the supporting structure; and
a table extending radially from the end of the post along a plane generally perpendicular to the post, the table having a reflective surface facing away from the supporting structure, wherein the post is so constructed so as to be sufficiently flexible to allow the reflective surface to be selectively moveable and positionable, with at least two degrees of freedom, when urged by a suitable actuating force. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12, 13, 15, 16, 18, 19, 20, 21, 22, 23)
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14. A moveable micromirror for selectively directing optical beams, the micromirror comprising:
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a substrate formed of a first single crystal of silicon;
a post extending from within a moat in a surface of the substrate, the post being formed of the single crystal of silicon;
a table fixed to and supported by the post and having a reflective surface facing away from the surface of the substrate and a second surface facing the surface of the substrate, the distance from the surface of the substrate to the second surface of the table being less than the length of the post; and
an actuator positioned on the surface of the substrate adjacent the second surface of the table and structured so as to be able to selectively position the table by applying an actuating force to the table wherein the post is sufficiently flexible to allow the reflective surface to be selectively moveable and positionable by the actuator.
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17. A method of making an array of moveable micromirrors, the method including:
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deep etching a silicon substrate so as to form posts surrounded by trenches;
etching back the surface of the substrate around the posts so as to allow the posts to protrude beyond the surface of the substrate; and
affixing a mirror to the top of a plurality of the posts.
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Specification