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Method for the manufacture of micro-mechanical components

  • US 20020086455A1
  • Filed: 12/20/2001
  • Published: 07/04/2002
  • Est. Priority Date: 12/21/2000
  • Status: Active Grant
First Claim
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1. A method for the manufacture of micro-mechanical components with at least one undercut layer element, said method comprising the steps of providing a layer stack that has a sacrificial layer, applied on a substrate and a first layer, which is to be undercut, applied on the sacrificial layer;

  • forming at least one etch hole in the first layer;

    isotropically etching the sacrificial layer so that the at least one undercut layer element is created;

    creating a passivation layer on the surface region between the at least one undercut layer element and the substrate; and

    selectively depositing a cover material relative to the passivation layer so that each etch hole is closed.

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