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Electrostatic efficiency of micromechanical devices

  • US 20020093721A1
  • Filed: 11/30/2000
  • Published: 07/18/2002
  • Est. Priority Date: 12/03/1999
  • Status: Active Grant
First Claim
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1. A micromechanical device having improved electrostatic efficiency, said device comprising:

  • a first member forming one half of an air-gap capacitor; and

    a second member forming one half of an air gap capacitor, said second member spaced apart from said first member by an air gap, said second member shaped such that said air gap is smaller in a first region than in a second region.

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