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Large-area individually addressable multi-beam x-ray system and method of forming same

  • US 20020094064A1
  • Filed: 01/22/2002
  • Published: 07/18/2002
  • Est. Priority Date: 10/06/2000
  • Status: Active Grant
First Claim
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1. A structure to generate x-rays comprising:

  • a stationary cathode structure having a plurality of stationary and individually electrically addressable field emissive electron sources defining a plurality of cathodes, each cathode disposed on a first side of the cathode structure;

    a stationary target structure having a deflection surface oriented non-perpendicularly to the first side of the cathode structure, the deflection surface defining a target;

    an object positioner disposed within an imaging zone; and

    a detector operatively positioned within the structure to receive and detect an x-ray from the target, wherein each cathode comprises a substrate and a gate electrode positioned parallel to and insulated from the substrate, the substrate comprising a field emissive material.

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