Electronically controlled vacuum pump
First Claim
1. A vacuum system comprising:
- a turbomolecular vacuum pump with a drive motor; and
an electronic control module having a programmed processor which controls the turbomolecular pump drive motor, the electronic control module being integral with the turbomolecular vacuum pump.
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Accused Products
Abstract
A vacuum system comprises, as an integral assembly, a vacuum pump with drive motor, a purge valve, a roughing valve and an electronic control module. A cryogenic vacuum pump and a turbomolecular vacuum pump are disclosed. The control module has a programmed processor for controlling the motor and valves and is user programmable for establishing specific control sequences. The integral electronic control module is removable from the assembly and is connected to the other devices through a common connector assembly. In the turbomolecular pump system proper introduction of a purge gas through the purge valve is detected by detecting the current load on the pump drive or by detecting foreline pressure. To test the purge gas status, the purge valve may be closed and then opened as drive current or pressure is monitored. After power failure, the controller will continue normal drive of the turbomolecular pump so long as the speed of the pump has remained above a threshold value. Otherwise the vent valve will have been opened, and a start-up sequence must be initiated. During shutdown, power to the pump drive motor is discontinued and the vent valve is opened before the roughing valve is closed.
39 Citations
17 Claims
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1. A vacuum system comprising:
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a turbomolecular vacuum pump with a drive motor; and
an electronic control module having a programmed processor which controls the turbomolecular pump drive motor, the electronic control module being integral with the turbomolecular vacuum pump. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12, 13, 14)
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15. A vacuum system comprising:
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a turbomolecular vacuum pump;
a vent valve which introduces gas into the turbomolecular pump for slowing the pump;
a roughing valve which opens a foreline of the turbomolecular pump to a roughing pump; and
an electronic controller which controls shutdown of the vacuum system by turning off power to the turbomolecular pump and opening the vent valve, and subsequently closing the roughing valve for preventing back streaming of gases through the turbomolecular pump.
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16. A vacuum system comprising:
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a turbomolecular pump;
a cryopump positioned in line with the turbomolecular pump; and
an electronic control module which controls the turbomolecular pump and cryopump.
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17. A vacuum system comprising:
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a turbomolecular pump having a first electronic control module which controls the turbomolecular pump, the first electronic control module being integral with the turbomolecular pump; and
a cryopump positioned in line with the turbomolecular pump, the cryopump having a second electronic control module which controls the cryopump, the second electronic control module being integral with the cryopump;
the first and second electronic control modules being connected through communications ports in a communication network.
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Specification