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Electronically controlled vacuum pump

  • US 20020094277A1
  • Filed: 03/08/2002
  • Published: 07/18/2002
  • Est. Priority Date: 07/16/1993
  • Status: Active Grant
First Claim
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1. A vacuum system comprising:

  • a turbomolecular vacuum pump with a drive motor; and

    an electronic control module having a programmed processor which controls the turbomolecular pump drive motor, the electronic control module being integral with the turbomolecular vacuum pump.

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