Integrated circuit inductors
First Claim
1. A method comprising:
- boring a plurality for substantially parallel perforations in a substrate having a pair of substantially parallel surfaces;
plugging the plurality of substantially parallel perforations with a highly conductive material to form a highly conductive segment; and
interconnecting the plurality of highly conductive segments to form a conductive path operable for producing a reinforcing magnetic field.
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0 Petitions
Accused Products
Abstract
The invention relates to an inductor comprising a plurality of interconnected conductive segments interwoven with a substrate. The inductance of the inductor is increased through the use of coatings and films of ferromagnetic materials such as magnetic metals, alloys, and oxides. The inductor is compatible with integrated circuit manufacturing techniques and eliminates the need in many systems and circuits for large off chip inductors. A sense and measurement coil, which is fabricated on the same substrate as the inductor, provides the capability to measure the magnetic field or flux produced by the inductor. This on chip measurement capability supplies information that permits circuit engineers to design and fabricate on chip inductors to very tight tolerances.
73 Citations
40 Claims
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1. A method comprising:
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boring a plurality for substantially parallel perforations in a substrate having a pair of substantially parallel surfaces;
plugging the plurality of substantially parallel perforations with a highly conductive material to form a highly conductive segment; and
interconnecting the plurality of highly conductive segments to form a conductive path operable for producing a reinforcing magnetic field. - View Dependent Claims (4, 5, 6, 7, 8, 9, 10)
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2. A method comprising:
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drilling a plurality of substantially parallel holes in a substrate having a plurality of substantially parallel surfaces;
coating at least one of the substantially parallel surfaces with a magnetic material;
filling the plurality of substantially parallel holes with a conductor to form a conductive segment; and
interconnecting the plurality of conductive segments to form a coil operable for producing a magnetic field in the coating. - View Dependent Claims (11, 12, 13, 14)
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3. A method comprising:
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piercing a substrate having a plurality of substantially parallel surfaces to form a plurality of substantially parallel perforations;
coating at least one of the substantially parallel surfaces with an insulating film;
coating the insulating film with a magnetic film;
coating the magnetic film with an insulating material;
depositing in at least two of the plurality of substantially parallel perforations a conductor to form a plurality of conductive segments; and
coupling the plurality of conductive segments with a conductive material to form a loop. - View Dependent Claims (15, 16, 17, 18, 19)
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20. A method of forming an inductor, comprising:
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forming a plurality of holes connecting first and second opposing surfaces of a substrate;
forming a magnetic film over a portion of the first surface;
filling the plurality of holes with a first conductive material to form first conductive segments; and
connecting the first conductive segments with second conductive segments to form a coil, with a portion of the first conductive segments traversing the magnetic film. - View Dependent Claims (21, 22, 23, 24, 25, 27, 28, 29, 30, 31)
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26. A method of forming an inductor, comprising:
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forming a plurality of through holes in a first region of a substrate;
coating a surface portion of the first region of the substrate with a magnetic film;
depositing a first conductor in the plurality of through holes; and
connecting the conductor formed in the plurality of through holes with a second conductor so as to form a coil surrounding the first region of the substrate.
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32. A method of forming an inductor, comprising:
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forming first and second sets of substantially parallel holes between opposing surfaces of a semiconductor substrate;
filling the first and second sets of substantially parallel holes with a conductive material to form first coil segments; and
connecting the first coil segments with second coil segments that traverse respective portion of the opposing surfaces of the semiconductor substrate. - View Dependent Claims (33, 34, 35, 37, 38, 39, 40)
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36. A method of forming an inductor, comprising:
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boring a plurality of holes in a substrate;
filling the plurality of holes with a first conductor;
connecting the first conductor with a second conductor to form a coil that surrounds a portion of the substrate.
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Specification