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Point array maskless lithography

  • US 20020097495A1
  • Filed: 03/08/2001
  • Published: 07/25/2002
  • Est. Priority Date: 11/14/2000
  • Status: Active Grant
First Claim
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1. A system for performing digital lithography onto a subject, the system comprising:

  • a light source for producing a first light;

    an optical element for individually focusing the first light into a plurality of second lights;

    a pixel panel for generating a digital pattern, the pixel panel having a plurality of pixels corresponding to the plurality of second lights; and

    a lens system for directing the digital pattern to the subject.

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