Magnetically-actuated micropump
First Claim
Patent Images
1. A microfluidic pump comprising:
- a substrate including a chamber;
at least one channel in communication with the chamber;
a flexible diaphragm forming a wall of the chamber; and
a magnetic member attached to the diaphragm.
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Abstract
A microfluidic pump having a substrate with a pump chamber and at least one channel in communication with the pump chamber for transporting a substance into or out of the pump chamber. A flexible diaphragm overlies the pump chamber, and a magnetic member is attached to the diaphragm. A magnet, such as an electromagnet, is positioned to attract and repel the magnetic member, thereby actuating the diaphragm, and causing a substance to be drawn into or out of the channel. A uni-directional or bi-directional check valve can be positioned in the channel to prevent backflow into the pump chamber. A control system can be coupled to the pump to adjust actuation rate of the diaphragm.
162 Citations
42 Claims
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1. A microfluidic pump comprising:
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a substrate including a chamber;
at least one channel in communication with the chamber;
a flexible diaphragm forming a wall of the chamber; and
a magnetic member attached to the diaphragm. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 13, 14, 15, 16, 17, 18, 19, 20)
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12. A microfluidic pump comprising:
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a substrate including a pump chamber;
at least one channel in communication with the pump chamber;
a flexible diaphragm overlying the pump chamber; and
means for actuating the flexible diaphragm.
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21. A system for transporting a substance, the system comprising:
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a substrate including a pump chamber;
at least one channel in communication with the pump chamber;
a flexible diaphragm forming a wall of the pump chamber;
means for actuating the flexible diaphragm; and
a control system coupled to control the means for actuating the flexible diaphragm. - View Dependent Claims (22, 23, 24, 25, 26, 27, 28, 30, 31, 32, 33, 35, 36, 37, 38, 39, 40, 41, 42)
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29. A method for transporting a substance using a pump system, wherein the pump system includes a chamber, at least one channel in communication with the chamber, a flexible diaphragm forming a wall of the chamber, and a magnetic member attached to the diaphragm, the method comprising:
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attracting the magnetic member to cause the substance to flow into the chamber; and
repelling the magnetic member to cause the substance in the chamber to flow out of the chamber.
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34. A method of fabricating a pump system for transporting a substance, the method comprising:
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forming a pump chamber in a substrate;
positioning at least one channel in communication with the pump chamber;
forming at least a portion of a wall of the pump chamber with a flexible diaphragm; and
attaching a magnetic member on the flexible diaphragm.
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Specification