Network solution system of analysis and evaluation
First Claim
1. A network solution analysis method in which a customer, a specimen analysis organization, and specimen analysis apparatus are connected to a network through a communication line, the specimen analysis organization acquires the measurement data by controlling the specimen analysis apparatus according to an order from the customer, the customer confirms the acquired measurement data received from the specimen analysis organization and the charge corresponding to the service content through a network computer, and the customer participates in the analysis work cooperatively with the specimen analysis organization.
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Abstract
The present invention provides a solution business for serving high speed and diversified analysis work/result and apparatus maintenance, and provides a function to control the apparatus of a customer and analysis organization with a common command through a network. The analysis organization provides the work involving high level operation and apparatus maintenance, and the interpretation and analysis of the acquired data. The customer participates to the analysis work on line through the video conference. The charge system corresponding to the analysis apparatus and operation content is set in a host computer of the network, the charge is presented to the customer on line as the analysis work proceeds, and the final cost is collected through a bank. Furthermore, the host computer is provided with a library function that stores the past data and literatures for viewing.
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Citations
10 Claims
- 1. A network solution analysis method in which a customer, a specimen analysis organization, and specimen analysis apparatus are connected to a network through a communication line, the specimen analysis organization acquires the measurement data by controlling the specimen analysis apparatus according to an order from the customer, the customer confirms the acquired measurement data received from the specimen analysis organization and the charge corresponding to the service content through a network computer, and the customer participates in the analysis work cooperatively with the specimen analysis organization.
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2. A network solution analysis method comprising a step in which the specimen analysis organization acquires the measurement data by controlling the specimen analysis apparatus of the customer or the specimen analysis organization according to the order from the customer, a step in which the customer confirms the charge corresponding to the acquired measurement data and concomitant service content received from the specimen organization through the network, and participates in the analysis work cooperatively with the specimen analysis organization, and a step in which the specimen analysis organization presents the analysis result to the customer, wherein the network is connected to the customer, the specimen analysis organization, and the specimen analysis apparatus through a communication line.
- 6. A network solution analysis system comprising a specimen analysis apparatus owned by a customer or a specimen analysis organization, a means for obtaining the measurement data that the specimen analysis organization acquires by controlling the specimen analysis apparatus according to the order received from the customer, and a computer having a function that the customer receives the acquired measurement data and the charge corresponding to the service content for the analysis work from the specimen analysis organization, and the measurement data and the charge are displayed on a screen of the computer, wherein the customer, the specimen analysis organization, and the specimen analysis apparatus are connected to a network through a communication line, and the analysis work is carried out through the network.
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8. A network solution analysis method used in the process for measuring the stress distribution of a specimen from a diffraction pattern obtained by irradiation of a charged particle beam onto the specimen comprising a step in which a customer and analysis organization are connected to a network through a communication line, the customer acquires the measurement data including a diffraction pattern of a specimen with receiving the technical service from the analysis organization through a network computer, and the measurement data is sent to the analysis organization, a step in which the analysis organization analyzes the measurement data including the diffraction pattern of the specimen to measure the stress distribution, and reports the result to the customer, and a step in which the customer confirms the report including the measurement result supplied from the analysis organization.
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9. A network solution analysis method used to measure the stress distribution of a specimen from a diffraction pattern obtained by irradiation of a charged particle beam onto the specimen comprising a step in which a customer and an analysis organization are connected to a network through a communication line, the analysis organization acquires the measurement data including a diffraction pattern of the specimen with discussion with the customer through the network, analyzes the measurement data including the diffraction pattern of the specimen to measure the stress distribution, and reports the result to the customer, and a step in which the customer confirms the report including the measurement result supplied from the analysis organization.
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10. A network solution analysis method used to measure the stress distribution of a semiconductor device from an electron diffraction pattern acquired by use of a transmission electron microscope comprising a step in which a customer and an analysis organization are connected to a network through a communication line, the analysis organization receives a specimen from the customer and acquires the measurement data including the diffraction pattern of the specimen with discussion with the customer each other through the network computer, and the analysis organization analyzes the measurement data including the diffraction pattern of the specimen to measure the stress distribution and reports the result to the customer, and a step in which the customer confirms the result report supplied from the analysis organization, and confirms the charge for the service content supplied from the analysis organization through the screen of the network computer.
Specification