High voltage semiconductor device
First Claim
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1. A semiconductor device comprising:
- a drain layer of a first conductivity type;
a buffer layer of a second conductivity type formed above the drain layer;
a high resistance layer of the second conductivity type formed on the buffer layer;
a base layer of the first conductivity type formed on the high resistance layer;
a source layer of the second conductivity type, containing a high concentration of impurities, formed in a surface region of the base layer;
a gate electrode formed in the base layer with an insulating film interposed therebetween; and
a low concentration layer formed between the drain layer and the buffer layer, an impurity concentration of the low concentration layer being lower than those of the drain layer and the buffer layer.
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Abstract
An IGBT has a punch-through structure including an n+ buffer layer. It includes a p− low concentration layer formed between the n+ buffer layer and a p+ drain layer. Owing to the low concentration layer, the drain current decreases to zero gradually, not rapidly, when the IGBT is turned off.
37 Citations
23 Claims
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1. A semiconductor device comprising:
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a drain layer of a first conductivity type;
a buffer layer of a second conductivity type formed above the drain layer;
a high resistance layer of the second conductivity type formed on the buffer layer;
a base layer of the first conductivity type formed on the high resistance layer;
a source layer of the second conductivity type, containing a high concentration of impurities, formed in a surface region of the base layer;
a gate electrode formed in the base layer with an insulating film interposed therebetween; and
a low concentration layer formed between the drain layer and the buffer layer, an impurity concentration of the low concentration layer being lower than those of the drain layer and the buffer layer. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12, 14, 15, 16, 17, 18, 19, 20, 21, 22, 23)
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13. A semiconductor device comprising:
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a drain layer of a first conductivity type;
a buffer layer of a second conductivity type formed above the drain layer;
a high resistance layer of the second conductivity type formed on the buffer layer;
a base layer of the first conductivity type formed on the high resistance layer;
a source layer of the second conductivity type, containing a high concentration of impurities, formed in a surface region of the base layer;
a gate electrode formed in the base layer with an insulating film interposed therebetween; and
a drain electrode to supply a potential to the drain layer, the drain layer having high concentration layers, whose impurity concentration is high, on sides near the buffer layer and the drain electrode, and a low concentration layer, whose impurity concentration is low, between the high concentration layers.
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Specification