Apparatus and method for visually identifying micro-forces with a palette of cantilever array blocks
First Claim
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1. An apparatus to measure micro-forces, comprising:
- a cantilever palette including a plurality of cantilever array blocks, each cantilever array block including a plurality of cantilevers, each cantilever including a plurality of cantilever fingers surrounded by a frame with frame fingers, said cantilever fingers and said frame fingers forming a diffraction grating, each cantilever array block being configured to be responsive to a predetermined micro-force, such that cantilevers of said cantilever array block deflect in the presence of said predetermined micro-force causing said diffraction grating to diffract light and thereby provide visual indicia of the presence of said predetermined micro-force.
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Abstract
An apparatus to measure micro-forces includes a cantilever palette with a set of cantilever array blocks. Each cantilever array block includes a set of cantilevers, with each cantilever including a set of cantilever fingers surrounded by a frame with frame fingers. The cantilever fingers and the frame fingers form a diffraction grating. Each cantilever array block is configured to be responsive to a predetermined micro-force, such that cantilevers of the cantilever array block deflect in the presence of the predetermined micro-force, which causes the diffraction grating to diffract light and thereby provide a visual indication of the presence of the predetermined micro-force.
130 Citations
21 Claims
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1. An apparatus to measure micro-forces, comprising:
a cantilever palette including a plurality of cantilever array blocks, each cantilever array block including a plurality of cantilevers, each cantilever including a plurality of cantilever fingers surrounded by a frame with frame fingers, said cantilever fingers and said frame fingers forming a diffraction grating, each cantilever array block being configured to be responsive to a predetermined micro-force, such that cantilevers of said cantilever array block deflect in the presence of said predetermined micro-force causing said diffraction grating to diffract light and thereby provide visual indicia of the presence of said predetermined micro-force. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12, 13, 15, 16, 17, 18, 19, 20, 21)
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14. A method of identifying micro-forces, said method comprising the steps of:
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forming a cantilever palette including a plurality of cantilever array blocks, each cantilever array block including a plurality of cantilevers, each cantilever including a plurality of cantilever fingers surrounded by a frame with frame fingers, said cantilever fingers and said frame fingers forming a diffraction grating, each cantilever array block being configured to be responsive to a predetermined micro-force;
exposing said cantilever palette to said predetermined micro-force, thereby causing cantilevers of said cantilever array block to deflect such that said diffraction grating produces diffracted light; and
visually observing said diffracted light from said diffraction grating to identify the presence of said predetermined micro-force.
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Specification
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Current AssigneeRegents of the University of California (University of California)
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Original AssigneeRegents of the University of California (University of California)
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InventorsZhao, Yang, Wu, Guanghua, Mao, Minyao, Kwon, Ohmyoung, Majumdar, Arunaya, Perazzo, Thomas Michael
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Granted Patent
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Time in Patent OfficeDays
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Field of Search
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US Class Current436/518
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CPC Class CodesB82Y 30/00 Nanotechnology for material...G01L 1/24 by measuring variations of ...G01L 5/0047 measuring forces due to res...Y10S 436/805 Optical propertyY10S 436/806 Electrical property or magn...
