Metallization structures for semiconductor device interconnects, methods for making same, and semiconductor devices including same
First Claim
1. A method for making a metallization structure comprising:
- forming a substrate comprising at least one metal layer on a surface thereof;
forming a dielectric layer over the at least one metal layer;
forming an aperture having at least one sidewall through the dielectric layer to expose a surface of the at least one metal layer;
forming a metal spacer on the at least one sidewall of the aperture; and
forming a conductive layer in a remaining portion of the aperture.
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Abstract
The present invention provides a metallization structure for semiconductor device interconnects such as a conductive line, including a substrate with a substantially planar upper surface, foundation metal layer disposed on a portion of the substrate upper surface, primary conducting metal layer overlying the foundation metal layer, and metal spacer on the sidewalls of the primary conducting metal layer and the foundation metal layer. The present invention also provides a metallization structure including a substrate with a foundation metal layer disposed thereon, a dielectric layer with an aperture therethrough being disposed on the substrate, where the bottom of the aperture exposes the foundation metal layer of the substrate, and a metal spacer on the sidewall of the aperture and a line or plug of a primary conducting metal fill the remaining portion of the aperture. The present invention also includes methods for making the metallization structures.
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Citations
45 Claims
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1. A method for making a metallization structure comprising:
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forming a substrate comprising at least one metal layer on a surface thereof;
forming a dielectric layer over the at least one metal layer;
forming an aperture having at least one sidewall through the dielectric layer to expose a surface of the at least one metal layer;
forming a metal spacer on the at least one sidewall of the aperture; and
forming a conductive layer in a remaining portion of the aperture. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12, 13, 14, 15, 16, 17, 18, 19, 20, 21, 22, 24, 25, 26, 27, 28, 29, 30, 31, 32, 33, 34, 35, 36, 37, 38, 39, 40, 41, 42, 43, 44, 45)
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23. A method for making a metallization structure comprising:
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forming a substrate comprising at least one metal layer on a surface thereof;
forming a dielectric layer over the at least one metal layer;
forming an aperture through the dielectric layer to expose a surface of the at least one metal layer;
forming a conducting layer in the aperture;
forming at least one upper metal layer overlying the dielectric layer and the conducting layer in the aperture;
removing portions of the at least one upper metal layer overlying the dielectric layer, removing the dielectric layer, and removing portions of the at least one metal layer surrounding the conducting layer to form a multilayer metal structure having at least one sidewall; and
forming a metal spacer on the at least one sidewall of the multilayer metal structure.
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Specification